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Langereis, Erik, Bouman, Menno, Keijmel, Jeroen, Heil, Stephan, Van de Sanden, M. C., Kessels, W. M.
Published in ECS transactions (03.10.2008)
Published in ECS transactions (03.10.2008)
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Opportunities for Plasma-Assisted Atomic Layer Deposition
Kessels, Erwin, Heil, Stephan, Langereis, Erik, van Hemmen, Hans, Knoops, Harm, Keuning, Wytze, van de Sanden, Richard
Published in ECS transactions (18.07.2007)
Published in ECS transactions (18.07.2007)
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Journal Article
ALD Options for Si-integrated Ultrahigh-density Decoupling Capacitors in Pore and Trench Designs
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Published in ECS transactions (18.07.2007)
Published in ECS transactions (18.07.2007)
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Journal Article
Remote Plasma and Thermal ALD of Al2O3 for Trench Capacitor Applications
van Hemmen, Hans, Heil, Stephan, Klootwijk, Johan, Roozeboom, F., Hodson, Chris, van de Sanden, Richard, Kessels, Erwin
Published in ECS transactions (18.07.2007)
Published in ECS transactions (18.07.2007)
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Sonsky, Jan, Donkers, Johannes,Josephus, Theodorus, Marinus, Heil, Stephan, Bastiaan, Simon
Year of Publication 18.11.2020
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Year of Publication 18.11.2020
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Semiconductor device and manufacturing method
Sonsky Jan, Donkers Johannes Josephus Theodorus Marinus, Heil Stephan Bastiaan Simon
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Year of Publication 13.03.2018
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Semiconductor device and manufacturing method
Donkers, Johannes, Josephus, Theodorus, Marinus, Heil, Stephan, Bastiaan, Simon, Aan De Stegge, Jos
Year of Publication 01.11.2017
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Year of Publication 01.11.2017
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Group 13 nitride semiconductor device and method of its manufacture
DELHOUGNE ROMAIN, BROEKMAN HANS, DONKERS JOHANNES THEODORUS MARINUS, HEIL STEPHAN
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Year of Publication 29.09.2015
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Semiconductor device and manufacturing method
de Keijser, Mark, Heil, Stephan, van der Schaar, Cecile, Broekman, Hans, Donkers, Johannes
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Year of Publication 07.06.2017
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Flow sensor
Heil Stephan, Phan Le Kim, Jedema Friso, van der Avoort Casper, Wunnicke Olaf
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Year of Publication 09.08.2016
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GaN HEMTs and GaN diodes
DONKERS, JOHANNES, HEIL, STEPHAN, CROON, JEROEN, SONSKY, JAN, HURKX, GODEFRIDUS
Year of Publication 25.06.2014
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Year of Publication 25.06.2014
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Semiconductor device and manufacturing method
DONKERS JOHANNES, VAN DER SCHAAR CECILIA, BROEKMAN HANS, HEIL STEPHAN, DE KEIJSER MARK
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Year of Publication 03.05.2016
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Semiconductor device comprising an active layer and a Schottky contact
DONKERS JOHANNES JOSEPHUS THEODORUS MARINUS, AAN DE STEGGE JOS, HEIL STEPHAN BASTIAAN SIMON
Year of Publication 05.04.2016
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Year of Publication 05.04.2016
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GROUP 13 NITRIDE SEMICONDUCTOR DEVICE AND METHOD OF ITS MANUFACTURE
DELHOUGNE ROMAIN, BROEKMAN HANS, DONKERS JOHANNES THEODORUS MARINUS, HEIL STEPHAN
Year of Publication 14.11.2013
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Year of Publication 14.11.2013
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SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD
DONKERS JOHANNES JOSEPHUS THEODORUS MARINUS, AAN DE STEGGE JOS, HEIL STEPHAN BASTIAAN SIMON
Year of Publication 12.11.2015
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Year of Publication 12.11.2015
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SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD
THEODORUS MARINUS DONKERS JOHANNES JOSEPHUS, SONSKY JAN, HEIL STEPHAN BASTIAAN SIMON
Year of Publication 12.11.2015
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Year of Publication 12.11.2015
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Semiconductor device and manufacturing method
Donkers, Johannes, Josephus, Theodorus, Marinus, Heil, Stephan, Bastiaan, Simon, Aan De Stegge, Jos
Year of Publication 11.11.2015
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Year of Publication 11.11.2015
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Semiconductor device and manufacturing method
HEIL, STEPHAN, BASTIAAN, SIMON, DONKERS, JOHANNES,JOSEPHUS, THEODORUS, MARINUS, SONSKY, JAN
Year of Publication 11.11.2015
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Year of Publication 11.11.2015
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Semiconductor heterojunction device
CROON JEROEN ANTOON, DONKERS JOHANNES JOSEPHUS THEODORUS MARINUS, SONSKY JAN, HURKX GODEFRIDUS ADRIANUS MARIA, HEIL STEPHAN BASTIAAN SIMON
Year of Publication 12.07.2016
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Year of Publication 12.07.2016
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