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"HEIKO HOMMEN"
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"HEIKO HOMMEN"
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Method of exposing a semiconductor wafer in an exposer
by
Stäcker, Jens
,
Hommen
,
Heiko
Year of Publication
24.05.2005
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Method of exposing a semiconductor wafer in an exposer
by
STAECKER JENS
,
HOMMEN HEIKO
Year of Publication
24.05.2005
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Adjustment marking for alignment of semiconductor wafer in photolithographic structuring apparatus using grid structure and partial structure each having evenly spaced parallel structural elements
by
STAECKER, JENS
,
HOMMEN
,
HEIKO
Year of Publication
04.05.2005
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Lateral position determination method for semiconductor substrate in photolithographic structuring apparatus using positioning marking scanned by detector array
by
STAECKER, JENS
,
HOMMEN
,
HEIKO
Year of Publication
04.05.2005
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Process for exposing a semiconductor wafer in an exposure device
by
STAECKER, JENS
,
HOMMEN
,
HEIKO
Year of Publication
10.03.2004
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Method of exposing a semiconductor wafer in an exposer
by
STACKER JENS
,
HOMMEN HEIKO
Year of Publication
05.02.2004
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Method of exposing a semiconductor wafer in an exposer
by
Hommen
,
Heiko
,
Stacker, Jens
Year of Publication
05.02.2004
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Arrangement for transferring information/structures to wafers
by
Staecker, Jens
,
Bruch, Uwe
,
Hommen
,
Heiko
Year of Publication
22.07.2008
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Arrangement for transferring information/structures to wafers
by
STAECKER JENS
,
HOMMEN HEIKO
,
BRUCH UWE
Year of Publication
22.07.2008
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Alignment mark for coarse alignment and fine alignment of a semiconductor wafer in an exposure tool
by
HOMMEN HEIKO
,
HASSE HOLGER
,
MATTIZA DIANA
Year of Publication
17.07.2007
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Alignment mark for coarse alignment and fine alignment of a semiconductor wafer in an exposure tool
by
Mattiza, Diana
,
Hommen
,
Heiko
,
Hasse, Holger
Year of Publication
17.07.2007
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Justiermarke zur Grobjustage und Feinjustage eines Halbleiterwafers in einem Belichtungsgerät
by
HASSE, HOLGER
,
MATTIZA, DIANA
,
HOMMEN
,
HEIKO
Year of Publication
30.03.2006
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Justiermarke zur Ausrichtung eines Halbleiterwafers in einem Belichtungsgerät und deren Verwendung
by
STAECKER, JENS
,
HOMMEN
,
HEIKO
Year of Publication
20.11.2008
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Anordnung zum Übertragen von Informationen/Strukturen auf Wafer unter Verwendung eines Stempels
by
STAECKER, JENS
,
BRUCH, JENS
,
HOMMEN
,
HEIKO
Year of Publication
28.04.2005
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Alignment mark for coarse alignment and fine alignment of a semiconductor wafer in an exposure tool
by
HOMMEN HEIKO
,
HASSE HOLGER
,
MATTIZA DIANA
Year of Publication
31.03.2005
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Wafer exposure device and method
by
BIRNSTEIN NORMAN
,
SCHUMACHER KARL
,
STAECKER JENS
,
HOMMEN HEIKO
Year of Publication
03.04.2008
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Verfahren zum Bestimmen einer lateralen Position eines Substrats in einer lithographischen Belichtungseinrichtung
by
STAECKER, JENS
,
HOMMEN
,
HEIKO
Year of Publication
20.12.2007
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Arrangement for transferring information/structures to wafers
by
Staecker, Jens
,
Bruch, Uwe
,
Hommen
,
Heiko
Year of Publication
04.11.2004
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Arrangement for transferring information/structures to wafers
by
STAECKER JENS
,
HOMMEN HEIKO
,
BRUCH UWE
Year of Publication
04.11.2004
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Appliance for transfer of information or structures onto wafer, using stamp with raised structures produced by suitable method, e.g. photolithography in conjunction with etching
by
STAECKER, JENS
,
BRUCH, JENS
,
HOMMEN
,
HEIKO
Year of Publication
14.10.2004
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