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Year of Publication 30.10.2006
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VERFAHREN ZUR HERSTELLUNG VON DIELEKTRISCHEN ZWISCHENSCHICHTEN MIT NIEDRIGER DIELEKTRIZITÄTSKONSTANTE FÜR BEOL- VERBINDUNGSLEITUNGEN MIT VERBESSERTER HAFTUNG UND NIEDRIGER FEHLERDICHTE
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METHOD OF FABICATING LOW-DIELECTRIC CONSTANT INTERLEVEL DIELECTRIC FILMS FOR BEOL INTERCONNECTS WITH ENHANCED ADHESION AND LOW-DEFECT DENSITY
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Year of Publication 12.07.2006
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Year of Publication 12.07.2006
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