Method of fabricating low-dielectric constant interlevel dielectric films for BEOL interconnects with enhanced adhesion and low-defect density
Eckert, Andrew Robert, Hay, John C, Hedrick, Jeffrey Curtis, Lee, Kang-Wook, Liniger, Eric Gerhard, Simonyi, Eva Erika
Year of Publication 24.09.2002
Get full text
Year of Publication 24.09.2002
Patent
METHOD FOR FORMING MUTUALLY CONNECTED STRUCTURE
FORNOF ANN RHEA-HELENE, HEDRICK JEFFREY CURTIS, NITTA SATYANARAYANA V, TYBERG CHRISTY SENSENICH, PURUSHOTHAMAN SAMPATH, GATES STEPHEN MCCONNELL
Year of Publication 20.09.2002
Get full text
Year of Publication 20.09.2002
Patent
Multilayer interconnect structure containing air gaps and method for making
Babich, Katherina E, Carruthers, Roy Arthur, Dalton, Timothy Joseph, Grill, Alfred, Hedrick, Jeffrey Curtis, Jahnes, Christopher Vincent, Mays, Ebony Lynn, Perraud, Laurent, Purushothaman, Sampath, Saenger, Katherine Lynn
Year of Publication 09.11.2004
Get full text
Year of Publication 09.11.2004
Patent
Multilayer interconnect structure containing air gaps and method for making
CARRUTHERS ROY ARTHUR, HEDRICK JEFFREY CURTIS, SAENGER KATHERINE LYNN, BABICH KATHERINA E, JAHNES CHRISTOPHER VINCENT, MAYS EBONY LYNN, DALTON TIMOTHY JOSEPH, GRILL ALFRED, PERRAUD LAURENT, PURUSHOTHAMAN SAMPATH
Year of Publication 09.11.2004
Get full text
Year of Publication 09.11.2004
Patent
Method for forming a porous dielectric material layer in a semiconductor device and device formed
HEDRICK JEFFREY CURTIS, RODBELL KENNETH PARKER, ROSENBERG ROBERT, DALTON TIMOTHY JOSEPH, NITTA SATYANARAYANA V, GRECO STEPHEN EDWARD, PURUSHOTHAMAN SAMPATH
Year of Publication 17.09.2002
Get full text
Year of Publication 17.09.2002
Patent
Method for forming a porous dielectric material layer in a semiconductor device and device formed
Dalton, Timothy Joseph, Greco, Stephen Edward, Hedrick, Jeffrey Curtis, Nitta, Satyanarayana V, Purushothaman, Sampath, Rodbell, Kenneth Parker, Rosenberg, Robert
Year of Publication 17.09.2002
Get full text
Year of Publication 17.09.2002
Patent
METHOD OF FABRICATING LOW-DIELECTRIC CONSTANT INTERLEVEL DIELECTRIC FILMS FOR BEOL INTERCONNECTS WITH ENHANCED ADHESION AND LOW-DEFECT DENSITY
HEDRICK, JEFFREY, CURTIS, ECKERT, ANDREW, ROBERT, HAY, JOHN, C, LEE, KANG-WOOK, SIMONYI, EVA, ERIKA, LINIGER, ERIC, GERHARD
Year of Publication 06.09.2002
Get full text
Year of Publication 06.09.2002
Patent
Line level air gaps
Chen, Shyng-Tsong, Chiras, Stefanie Ruth, Colburn, Matthew Earl, Dalton, Timothy Joseph, Hedrick, Jeffrey Curtis, Huang, Elbert Emin, Kumar, Kaushik Arun, Lane, Michael Wayne, Malone, Kelly, Narayan, Chandrasekhar, Nitta, Satyanarayana Venkata, Purushothaman, Sampath, Rosenburg, Robert, Tyberg, Christy Sensenich, Yu, Roy RongQing
Year of Publication 01.08.2006
Get full text
Year of Publication 01.08.2006
Patent
Method for forming a porous dielectric material layer in a semiconductor device and device formed
HEDRICK JEFFREY CURTIS, RODBELL KENNETH PARKER, ROSENBERG ROBERT, DALTON TIMOTHY JOSEPH, NITTA SATYANARAYANA V, GRECO STEPHEN EDWARD, PURUSHOTHAMAN SAMPATH
Year of Publication 20.06.2002
Get full text
Year of Publication 20.06.2002
Patent
Multilevel interconnect structure containing air gaps and method for making
Grill, Alfred, Hedrick, Jeffrey Curtis, Jahnes, Christopher Vincent, Nitta, Satyanarayana Venkata, Petrarca, Kevin S, Purushothaman, Sampath, Saenger, Katherine Lynn, Whitehair, Stanley Joseph
Year of Publication 18.05.2004
Get full text
Year of Publication 18.05.2004
Patent
Multilevel interconnect structure containing air gaps and method for making
HEDRICK JEFFREY CURTIS, NITTA SATYANARAYANA VENKATA, SAENGER KATHERINE LYNN, PETRARCA KEVIN S, WHITEHAIR STANLEY JOSEPH, JAHNES CHRISTOPHER VINCENT, GRILL ALFRED, PURUSHOTHAMAN SAMPATH
Year of Publication 18.05.2004
Get full text
Year of Publication 18.05.2004
Patent
PRODUCTION OF CELLULAR POLYMER
YUN C RYAO, ROBERT DENIS MILLER, JAMES LUPTON HEDRICK, JEFFREY CURTIS HEDRICK, TAA YUAN SHII
Year of Publication 27.01.1998
Get full text
Year of Publication 27.01.1998
Patent
Multilayer interconnect structure containing air gaps and method for making
CARRUTHERS ROY ARTHUR, HEDRICK JEFFREY CURTIS, SAENGER KATHERINE LYNN, BABICH KATHERINA E, JAHNES CHRISTOPHER VINCENT, MAYS EBONY LYNN, DALTON TIMOTHY JOSEPH, GRILL ALFRED, PERRAUD LAURENT, PURUSHOTHAMAN SAMPATH
Year of Publication 31.10.2002
Get full text
Year of Publication 31.10.2002
Patent
Multilevel interconnect structure containing air gaps and method for making
HEDRICK JEFFREY CURTIS, NITTA SATYANARAYANA VENKATA, SAENGER KATHERINE LYNN, PETRARCA KEVIN S, WHITEHAIR STANLEY JOSEPH, JAHNES CHRISTOPHER VINCENT, GRILL ALFRED, PURUSHOTHAMAN SAMPATH
Year of Publication 12.09.2002
Get full text
Year of Publication 12.09.2002
Patent
Method of forming multilevel interconnect structure containing air gaps including utilizing both sacrificial and placeholder material
HEDRICK JEFFREY CURTIS, NITTA SATYANARAYANA VENKATA, SAENGER KATHERINE LYNN, PETRARCA KEVIN S, WHITEHAIR STANLEY JOSEPH, JAHNES CHRISTOPHER VINCENT, GRILL ALFRED, PURUSHOTHAMAN SAMPATH
Year of Publication 02.07.2002
Get full text
Year of Publication 02.07.2002
Patent
Method of forming multilevel interconnect structure containing air gaps including utilizing both sacrificial and placeholder material
Grill, Alfred, Hedrick, Jeffrey Curtis, Jahnes, Christopher Vincent, Nitta, Satyanarayana Venkata, Petrarca, Kevin S, Purushothaman, Sampath, Saenger, Katherine Lynn, Whitehair, Stanley Joseph
Year of Publication 02.07.2002
Get full text
Year of Publication 02.07.2002
Patent