WORK CLEANING PROCESSING METHOD AND WORK CLEANING PROCESSING SYSTEM
HEBIKAWA YORIHIRO, KANEKO YUKI, WAKASUGI KATSURO, IWASAKI FUMITOSHI, NODA KAITO
Year of Publication 10.02.2022
Get full text
Year of Publication 10.02.2022
Patent
EPITAXIAL GROWTH APPARATUS
HEBIKAWA YORIHIRO, SUGIMOTO SEIJI, ONO NAOKI, KISHI HIROYUKI, HAMANO MANABU
Year of Publication 02.12.2010
Get full text
Year of Publication 02.12.2010
Patent
METHOD OF MANUFACTURING EPITAXIAL WAFER
HEBIKAWA YORIHIRO, FUNABIKI YUUKI, MIZUTA MASAHIKO, TAKANASHI KEIICHI, HIEDA DAISUKE
Year of Publication 02.09.2010
Get full text
Year of Publication 02.09.2010
Patent
METHOD OF MANUFACTURING EPITAXIAL WAFER
HEBIKAWA YORIHIRO, FUNABIKI YUUKI, MIZUTA MASAHIKO, TAKANASHI KEIICHI, HIEDA DAISUKE
Year of Publication 08.04.2010
Get full text
Year of Publication 08.04.2010
Patent