Search Results - "HAUSMANN DENNIS M" :: K.UTB vyhledávací portál

by Reddy, Sirish K, Hausmann, Dennis M, Knisley, Thomas Joseph, Gottscho, Richard A, Varadarajan, Bhadri N, Antonelli, George Andrew, Marks, Jeffrey, LaVoie, Adrien, Kolics, Artur
Year of Publication 19.03.2020

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Integration of fully aligned via through selective deposition and resistivity reduction

by HAUSMANN, DENNIS M, SHARMA, KASHISH, MAHOROWALA, ARPAN PRAVIN, RAMNANI, PANKAJ GHANSHYAM, LEMAIRE, PAUL C
Year of Publication 01.03.2023

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Integrating atomic scale processes: ALD (atomic layer deposition) and ale (atomic layer etch)

by Yang, Wenbing, Lill, Thorsten, Kim, Taeseung, Hausmann, Dennis M, Kanarik, Keren Jacobs, Kabansky, Alexander, Tan, Samantha, Marks, Jeffrey, Singh, Harmeet
Year of Publication 22.01.2019

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METHOD FOR REDUCING WET ETCH RATE OF SIN FILM WITHOUT DAMAGING UNDERLYING SUBSTRATE

by MCKERROW ANDREW JOHN, HAUSMANN DENNIS M
Year of Publication 28.06.2019

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Selective inhibition in atomic layer deposition of silicon-containing films

by Henri Jon, Tang Shane, van Schravendijk Bart J, Hausmann Dennis M, Leeser Karl F
Year of Publication 23.01.2018

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Vacuum-integrated hardmask processes and apparatus

by Reddy, Sirish K, Hausmann, Dennis M, Knisley, Thomas Joseph, Gottscho, Richard A, Varadarajan, Bhadri N, Antonelli, George Andrew, Marks, Jeffrey, LaVoie, Adrien, Kolics, Artur
Year of Publication 24.12.2019

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Integrating atomic scale processes: ALD (atomic layer deposition) and ALE (atomic layer etch)

by Yang, Wenbing, Lill, Thorsten, Kim, Taeseung, Tan, Samantha SiamHwa, Hausmann, Dennis M, Kanarik, Keren Jacobs, Kabansky, Alexander, Marks, Jeffrey, Singh, Harmeet
Year of Publication 24.12.2019

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Deposition of aluminum oxide etch stop layers

by Rainville Meliha Gozde, Reddy Kapu Sirish, Shankar Nagraj, Hausmann Dennis M
Year of Publication 02.01.2018

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EUV photopatterning of vapor-deposited metal oxide-containing hardmasks

by SMITH, DAVID, HAUSMANN, DENNIS M
Year of Publication 16.08.2017

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SELECTIVE DEPOSITION WITH ATOMIC LAYER ETCH RESET

by RAINVILLE, Meliha Gozde, PORTER, David W, SHANKAR, Nagraj, REDDY, Kapu Sirish, HAUSMANN, Dennis M, SMITH, David Charles, SIVARAMAKRISHNAN, Karthik
Year of Publication 29.11.2018

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SELECTIVE DEPOSITION WITH ATOMIC LAYER ETCH RESET

by Sivaramakrishnan, Karthik, Hausmann, Dennis M, Smith, David Charles, Reddy, Kapu Sirish, Rainville, Meliha Gozde, Shankar, Nagraj, Porter, David W
Year of Publication 25.10.2018

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