ION IMPLANTATION DEVICE WITH A DUAL PUMPING MODE AND METHOD THEREOF
HATEM, CHRISTOPHER, R, SCHEUER, JAY, THOMAS, OLSON, JOSEPH, C, ENGLAND, JONATHAN, GERALD
Year of Publication 15.05.2008
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Year of Publication 15.05.2008
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ION IMPLANTATION DEVICE WITH A DUAL PUMPING MODE AND METHOD THEREOF
OLSON JOSEPH C, HATEM CHRISTOPHER R, SCHEUER JAY THOMAS, ENGLAND JONATHAN GERALD
Year of Publication 08.05.2008
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Year of Publication 08.05.2008
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TECHNIQUES FOR FORMING SHALLOW JUNCTIONS
AREVALO EDWIN A, HATEM CHRISTOPHER R, RENAU ANTHONY, ENGLAND JONATHAN GERALD
Year of Publication 08.05.2008
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Year of Publication 08.05.2008
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TECHNIQUES FOR REMOVING MOLECULAR FRAGMENTS FROM AN ION IMPLANTER
LOW RUSSELL J, HATEM CHRISTOPHER R, SCHEUER JAY THOMAS, EVANS MORGAN D, ENGLAND JONATHAN GERALD
Year of Publication 08.05.2008
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Year of Publication 08.05.2008
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Method for executing patterning implementation on crystal substrate
RAMAPPA DEEPAK, RIORDON BENJAMIN B, HATEM CHRISTOPHER R, MAYNARD HELEN L, BATEMAN NICHOLAS P. T
Year of Publication 24.12.2014
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Year of Publication 24.12.2014
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Method of increasing production of carbon-containing ionized species, method of increasing current of carbon-containing ionized species, and method of implanting carbon-containing ionized species into substrate
CHANEY, CRAIG R, DORI, ADOLPH R, PEREL, ALEXANDER S, HATEM, CHRISTOPHER R
Year of Publication 01.07.2014
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Year of Publication 01.07.2014
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Techniques for forming shallow junctions
AREVALO, EDWIN A, ENGLAND, JONATHAN GERALD, RENAU, ANTHONY, HATEM, CHRISTOPHER R
Year of Publication 21.05.2014
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Year of Publication 21.05.2014
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Techniques for forming shallow junctions
AREVALO EDWIN A, HATEM CHRISTOPHER R, RENAU ANTHONY, ENGLAND JONATHAN GERALD
Year of Publication 09.01.2013
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Year of Publication 09.01.2013
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Self-aligned masking for solar cell manufacture
RAMAPPA DEEPAK, RIORDON BENJAMIN B, HATEM CHRISTOPHER R, MAYNARD HELEN L, BATEMAN NICHOLAS P. T
Year of Publication 12.09.2012
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Year of Publication 12.09.2012
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Ethane implantation with a dilution gas
DORI ADOLPH R, PEREL ALEXANDER S, HATEM CHRISTOPHER R, CHANEY CRAIG R
Year of Publication 18.07.2012
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Year of Publication 18.07.2012
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Optimized halo or pocket cold implants
RODIER DENNIS, THANIGAIVELAN THIRUMAL, HATEM CHRISTOPHER R, SHIM KYU-HA, COLOMBEAU BENJAMIN
Year of Publication 20.06.2012
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Year of Publication 20.06.2012
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Self-aligned masking for solar cell manufacture
RAMAPPA, DEEPAK, BATEMAN, NICHOLAS P. T, MAYNARD, HELEN L, RIORDON, BENJAMIN B, HATEM, CHRISTOPHER R
Year of Publication 01.11.2011
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Year of Publication 01.11.2011
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