Method to control uniformity using tri-zone showerhead
TODOROW VALENTIN N, HAMMOND, IV EDWARD P, BELEN RODOLFO P, PATERSON ALEXANDER M, HATCHER BRIAN K, KATZ DAN
Year of Publication 29.11.2011
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Year of Publication 29.11.2011
Patent
Method to control uniformity using tri-zone showerhead
Belen, Rodolfo P, Hammond, IV, Edward P, Hatcher, Brian K, Katz, Dan, Paterson, Alexander M, Todorow, Valentin N
Year of Publication 29.11.2011
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Year of Publication 29.11.2011
Patent
Plasma reactor with center-fed multiple zone gas distribution for improved uniformity of critical dimension bias
TODOROW VALENTIN N, HAMMOND, IV EDWARD P, PATERSON ALEXANDER M, BELEN RODOLFO P, PANAGOPOULOS THEODOROS, PALAGASHVILI DAVID, KATZ DAN, HATCHER BRIAN K
Year of Publication 07.08.2012
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Year of Publication 07.08.2012
Patent
Plasma reactor with center-fed multiple zone gas distribution for improved uniformity of critical dimension bias
Katz, Dan, Palagashvili, David, Hatcher, Brian K, Panagopoulos, Theodoros, Todorow, Valentin N, Hammond, IV, Edward P, Paterson, Alexander M, Belen, Rodolfo P
Year of Publication 07.08.2012
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Year of Publication 07.08.2012
Patent
METHOD TO CONTROL UNIFORMITY USING TRI-ZONE SHOWERHEAD
TODOROW VALENTIN N, HAMMOND, IV EDWARD P, BELEN RODOLFO P, PATERSON ALEXANDER M, HATCHER BRIAN K, KATZ DAN
Year of Publication 03.09.2009
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Year of Publication 03.09.2009
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Process using combined capacitively and inductively coupled plasma sources for controlling plasma ion radial distribution
TODOROW VALENTIN N, HAMMOND, IV EDWARD P, PANAGOPOULOS THEODOROS, MATYUSHKIN ALEXANDER, PATERSON ALEXANDER, HOLLAND JOHN P, HATCHER BRIAN K, KATZ DAN
Year of Publication 24.08.2010
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Year of Publication 24.08.2010
Patent
Process using combined capacitively and inductively coupled plasma sources for controlling plasma ion radial distribution
Paterson, Alexander, Todorow, Valentin N, Panagopoulos, Theodoros, Hatcher, Brian K, Katz, Dan, Hammond, IV, Edward P, Holland, John P, Matyushkin, Alexander
Year of Publication 24.08.2010
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Year of Publication 24.08.2010
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