Impact of CoFeB surface roughness on reliability of MgO films in CoFeB/MgO/CoFeB magnetic tunnel junction
Park, Hyeonwoo, Teramoto, Akinobu, Tsuchimoto, Jun-Ichi, Hayashi, Marie, Hashimoto, Keiichi, Sugawa, Shigetoshi
Published in Japanese Journal of Applied Physics (01.08.2019)
Published in Japanese Journal of Applied Physics (01.08.2019)
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Journal Article
Proposal of tunneling- and diffusion-current hybrid MOSFET: A device simulation study
Furukawa, Kiichi, Teramoto, Akinobu, Kuroda, Rihito, Suwa, Tomoyuki, Hashimoto, Keiichi, Kojiri, Takashi, Sugawa, Shigetoshi
Published in Japanese Journal of Applied Physics (01.04.2016)
Published in Japanese Journal of Applied Physics (01.04.2016)
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Journal Article
Effect of Hydrogen on Silicon Nitrides Formation by Microwave Excited Plasma Enhanced Chemical Vapor Deposition
Teramoto, Akinobu, Nakao, Yukihisa, Suwa, Tomoyuki, Hashimoto, Keiichi, Motoya, Tsukasa, Hirayama, Masaki, Sugawa, Shigetoshi, Ohmi, Tadahiro
Published in ECS transactions (31.03.2015)
Published in ECS transactions (31.03.2015)
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Journal Article
High Selectivity in Dry Etching of Silicon Nitride over Si Using a Novel Hydrofluorocarbon Etch Gas in a Microwave Excited Plasma for FinFET
Nakao, Yukihisa, Matsuo, Takatoshi, Teramoto, Akinobu, Utsumi, Hidetoshi, Hashimoto, Keiichi, Kuroda, Rihito, Shirai, Yasuyuki, Sugawa, Shigetoshi, Ohmi, Tadahiro
Published in ECS transactions (26.03.2014)
Published in ECS transactions (26.03.2014)
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Journal Article
Distribution of seismic coupling on the subducting plate boundary in northeastern Japan inferred from GPS observations
Nishimura, Takuya, Miura, Satoshi, Tachibana, Kenji, Hashimoto, Keiichi, Sato, Toshiya, Hori, Syuitchiro, Murakami, Eiju, Kono, Toshio, Nida, Koichi, Mishina, Masaaki, Hirasawa, Tomowo, Miyazaki, Shin'ichi
Published in Tectonophysics (30.08.2000)
Published in Tectonophysics (30.08.2000)
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Influence of silicon wafer surface roughness on semiconductor device characteristics
Mori, Keiichiro, Samata, Shuichi, Mitsugi, Noritomo, Teramoto, Akinobu, Kuroda, Rihito, Suwa, Tomoyuki, Hashimoto, Keiichi, Sugawa, Shigetoshi
Published in Japanese Journal of Applied Physics (01.07.2020)
Published in Japanese Journal of Applied Physics (01.07.2020)
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