High performance diffraction gratings made by e-beam lithography
Zeitner, Uwe D., Oliva, Maria, Fuchs, Frank, Michaelis, Dirk, Benkenstein, Tino, Harzendorf, Torsten, Kley, Ernst-Bernhard
Published in Applied physics. A, Materials science & processing (01.12.2012)
Published in Applied physics. A, Materials science & processing (01.12.2012)
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Journal Article
Conference Proceeding
Pulse compression grating fabrication by diffractive proximity photolithography
Stuerzebecher, Lorenz, Fuchs, Frank, Harzendorf, Torsten, Zeitner, Uwe D
Published in Optics letters (15.02.2014)
Published in Optics letters (15.02.2014)
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Journal Article
Highly efficient three-level blazed grating in the resonance domain
Oliva, Maria, Michaelis, Dirk, Benkenstein, Tino, Dunkel, Jens, Harzendorf, Torsten, Matthes, Andre, Zeitner, Uwe D
Published in Optics letters (15.08.2010)
Published in Optics letters (15.08.2010)
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Journal Article
Black and white fused silica: modified sol-gel process combined with moth-eye structuring for highly absorbing and diffuse reflecting SiO 2 glass
Brunner, Robert, Kraus, Matthias, Hirte, Johannes, Diao, Zhaolu, Weishaupt, Klaus, Spatz, Joachim P., Harzendorf, Torsten, Trost, Marcus, Munser, Anne-Sophie, Schröder, Sven, Baer, Michael
Published in Optics express (26.10.2020)
Published in Optics express (26.10.2020)
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Journal Article
Black and white fused silica: modified sol-gel process combined with moth-eye structuring for highly absorbing and diffuse reflecting SiO2 glass
Brunner, Robert, Kraus, Matthias, Hirte, Johannes, Diao, Zhaolu, Weishaupt, Klaus, Spatz, Joachim P, Harzendorf, Torsten, Trost, Marcus, Munser, Anne-Sophie, Schröder, Sven, Baer, Michael
Published in Optics express (26.10.2020)
Published in Optics express (26.10.2020)
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Journal Article
Advanced mask aligner lithography: new illumination system
Voelkel, Reinhard, Vogler, Uwe, Bich, Andreas, Pernet, Pascal, Weible, Kenneth J, Hornung, Michael, Zoberbier, Ralph, Cullmann, Elmar, Stuerzebecher, Lorenz, Harzendorf, Torsten, Zeitner, Uwe D
Published in Optics express (27.09.2010)
Published in Optics express (27.09.2010)
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Journal Article
Ultra-high aspect ratio replaceable AFM tips using deformation-suppressed focused ion beam milling
Savenko, Alexey, Yildiz, Izzet, Petersen, Dirch Hjorth, Bøggild, Peter, Bartenwerfer, Malte, Krohs, Florian, Oliva, Maria, Harzendorf, Torsten
Published in Nanotechnology (22.11.2013)
Published in Nanotechnology (22.11.2013)
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Journal Article
Miniature Integrated Spectrometer Array
Danz, Norbert, Hofer, Bernd, Forster, Erik, Harzendorf, Torsten, Dannberg, Peter, Leitel, Robert, Kleinle, Sylke, Brunner, Robert
Published in 2019 24th Microoptics Conference (MOC) (01.11.2019)
Published in 2019 24th Microoptics Conference (MOC) (01.11.2019)
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Conference Proceeding
OPTICAL ASSEMBLY FOR THE SPECTRAL DISPERSION OF LIGHT
Flügel-Paul, Thomas, Michaelis, Dirk, Harzendorf, Torsten, Zeitner, Uwe Detlef
Year of Publication 25.12.2019
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Year of Publication 25.12.2019
Patent
Optical Arrangement for Spectral Decomposition of Light
Harzendorf Torsten, Michaelis Dirk, Zeitner Uwe Detlef, Flügel-Paul Thomas
Year of Publication 11.01.2018
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Year of Publication 11.01.2018
Patent
METHOD AND DEVICE FOR MEASURING DISTANCE USING A DIFFRACTIVE STRUCTURE
VOGLER, Uwe, HARZENDORF, Torsten, ZEITNER, Uwe D, STÜRZEBECHER, Lorenz, VÖLKEL, Reinhard
Year of Publication 31.07.2019
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Year of Publication 31.07.2019
Patent
METHOD AND DEVICE FOR MEASURING DISTANCE USING A DIFFRACTIVE STRUCTURE
HARZENDORF, TORSTEN, VÖLKEL, REINHARD, VOGLER, UWE, STÜRZEBECHER, LORENZ, ZEITNER, UWE D
Year of Publication 11.02.2015
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Year of Publication 11.02.2015
Patent