Search Results - "HARTJES, JOACHIM" :: K.UTB vyhledávací portál

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광학 시스템, 리소그래피 장치 및 방법

by HARTJES JOACHIM
Year of Publication 09.04.2019

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반도체 리소그래피용 투영 노광 장치

by HARTJES JOACHIM, GRUNER TORALF, WOLF ALEXANDER
Year of Publication 12.08.2022

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특히 마이크로리소그래픽 투영 노광 장치의 광학 시스템 내 조립체

by HARTJES JOACHIM, GRUNER TORALF, WOLF ALEXANDER
Year of Publication 23.06.2022

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특히 EUV 리소그래피용 광학 시스템

by GRUNER TORALF, HARTJES JOACHIM, SCHWAB MARKUS, SCHICKETANZ THOMAS
Year of Publication 30.10.2023

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LITHOGRAPHY APPARATUS WITH SEGMENTED MIRROR

by HARTJES JOACHIM
Year of Publication 13.03.2015

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마이크로리소그래피용 광학 시스템에서 광학 요소의 가열 상태를 결정하기 위한 방법 및 디바이스

by GRUNER TORALF, HARTJES JOACHIM, HAUF MARKUS, BEURER GERHARD
Year of Publication 31.03.2021

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플라즈마의 에칭 효과에 대한 보호를 위한 차폐부를 갖는 EUV 방사선용 광학 장치

by HARTJES JOACHIM, HILD KERSTIN, HAAS SIMON, BECKER MORITZ, LIEBAUG BJOERN
Year of Publication 25.03.2020

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OPTICAL ARRANGEMENT FOR EUV LITHOGRAPHY AND METHOD OF REGENERATING A GAS-BINDING COMPONENT

by HARTJES, Joachim
Year of Publication 15.12.2022

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Optical arrangement and method for repairing the optical arrangement after a shock load

by Hartjes, Joachim
Year of Publication 11.10.2022

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METHOD FOR PRODUCING AN OPTICAL ELEMENT FOR AN OPTICAL SYSTEM IN PARTICULAR FOR A MICROLITHOGRAPHICAL PROJECTION EXPOSURE UNIT

by HARTJES JOACHIM, HILD KERSTIN, FICHTL ROBERT, STICKEL FRANZ JOSEF
Year of Publication 19.09.2017

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OPTICAL COMPONENT

by GRUNER TORALF, HARTJES JOACHIM, SCHWAB MARKUS, WOLF ALEXANDER, PATRA MICHAEL
Year of Publication 01.09.2017

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PROJECTION EXPOSURE APPARATUS WITH WAVEFRONT MEASURING DEVICE AND OPTICAL WAVEFRONT MANIPULATOR

by GRUNER TORALF, HARTJES JOACHIM, SCHWAB MARKUS, BLEIDISTEL SASCHA, ARNZ MICHAEL
Year of Publication 23.08.2017

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PROJECTION EXPOSURE APPARATUS COMPRISING A MEASURING SYSTEM FOR MEASURING AN OPTICAL ELEMENT

by HARTJES JOACHIM, GRUNER TORALF, BLEIDISTEL SASCHA
Year of Publication 19.09.2014

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SUPPORT FOR AN OPTICAL ELEMENT

by Gruner, Toralf, Hartjes, Joachim
Year of Publication 27.07.2023

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OPTICAL ARRANGEMENT AND METHOD FOR REPAIRING THE OPTICAL ARRANGEMENT AFTER A SHOCK LOAD

by Hartjes, Joachim
Year of Publication 02.07.2020

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Optical system, lithography apparatus and method

by Hartjes, Joachim
Year of Publication 07.04.2020

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SUPPORT OF AN OPTICAL UNIT

by VOGT, MARTIN, HARTJES, JOACHIM
Year of Publication 19.12.2022

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SUPPORT OF AN OPTICAL UNIT

by HARTJES, Joachim, VOGT, Martin
Year of Publication 31.08.2022

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OPTICAL SYSTEM, LITHOGRAPHY APPARATUS AND METHOD

by Hartjes, Joachim
Year of Publication 27.06.2019

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Support of an optical unit

by Vogt, Martin, Hartjes, Joachim
Year of Publication 19.04.2022

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