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"HARLALKA AKSHAY DIPAKKUMAR"
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"HARLALKA AKSHAY DIPAKKUMAR"
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리소그래피 장치의 일부를 세정하기 위한 세정 툴 및 방법
by
RODAK DANIEL PAUL
,
HARLALKA AKSHAY DIPAKKUMAR
,
SLOAN ERIC SCOTT
Year of Publication
09.01.2023
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리소그래피 이미징을 위한 방법 및 장치
by
HARLALKA AKSHAY DIPAKKUMAR
,
SLOAN ERIC SCOTT
,
LOGANATHAN MUTHUKUMARAN
,
CHANG BILL
,
DEL PUERTO SANTIAGO E
,
WIHBEY III JOSEPH GEORGE
,
CHILLARA VENKATA SIVA CHAITHANYA
,
EVANS BRANDON ADAM
,
BURBANK DANIEL NATHAN
Year of Publication
30.07.2024
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Lithography support cleaning with cleaning substrate having controlled geometry and composition
by
Harlalka
,
Akshay Dipakkumar
,
Levy, Keane Michael
Year of Publication
09.04.2024
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LITHOGRAPHY SUPPORT CLEANING WITH CLEANING SUBSTRATE HAVING CONTROLLED GEOMETRY AND COMPOSITION
by
HARLALKA AKSHAY DIPAKKUMAR
,
LEVY KEANE MICHAEL
Year of Publication
11.06.2021
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apparatus specially adapted therefor
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