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Saito, Taichi, Takahashi, Kazunori, Ando, Akira, Hara, Shiro
Published in 2018 International Symposium on Semiconductor Manufacturing (ISSM) (01.12.2018)
Published in 2018 International Symposium on Semiconductor Manufacturing (ISSM) (01.12.2018)
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Quartz crystal microbalance for real-time monitoring chlorosilane gas transport in slim vertical cold wall chemical vapor deposition reactor
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Published in Materials science in semiconductor processing (01.02.2020)
Published in Materials science in semiconductor processing (01.02.2020)
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IMURA FUMITO, MORISONO TETSUYA, HARA SHIRO, KUMPUAN SOMAWANG, KAMASAKI KAYO, YOSHINAGA TAKAFUMI, KIKUNO TOSHIHIRO, ISHIDA YUKI, FUKUYAMA MITSUHIKO
Year of Publication 04.11.2022
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Year of Publication 04.11.2022
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Transport phenomena in a slim vertical atmospheric pressure chemical vapor deposition reactor utilizing natural convection
Yamada, Ayami, Li, Ning, Matsuo, Miya, Muroi, Mitsuko, Habuka, Hitoshi, Ishida, Yuuki, Ikeda, Shin-Ichi, Hara, Shiro
Published in Materials science in semiconductor processing (15.11.2017)
Published in Materials science in semiconductor processing (15.11.2017)
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Diagnostic accuracy of out-of-center sleep testing（OCST）in our sleep center
Ohmura, Kazuyuki, Suga, Tatsuo, Yoshino, Muneaki, Suzuki, Yukari, Nakamura, Miki, Nematu, Kaori, Osada, Tomomi, Hara, Shiro, Aoki, Yasuhiro
Published in The Journal of the Japan Society for Respiratory Care and Rehabilitation (01.05.2018)
Published in The Journal of the Japan Society for Respiratory Care and Rehabilitation (01.05.2018)
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Quartz Crystal Microbalances for Evaluating Gas Motion Differences between Dichlorosilane and Trichlorosilane in Ambient Hydrogen in a Slim Vertical Cold Wall Chemical Vapor Deposition Reactor
Otani, Mana, Takahashi, Toshinori, Habuka, Hitoshi, Ishida, Yuuki, Ikeda, Shin-Ichi, Hara, Shiro
Published in Advances in chemical engineering and science (2020)
Published in Advances in chemical engineering and science (2020)
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WET PROCESSING DEVICE USING SYRINGE
MATSUDA SONOKO, HARA SHIRO, KOBAYASHI AKIO, KUMPUAN SOMAWANG, UNNO TAKASHI
Year of Publication 18.07.2019
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Year of Publication 18.07.2019
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WET PROCESSING APPARATUS
GOTO AKIHIRO, AMANO HIROSHI, HARA SHIRO, KHUMPUANG SOMMAWAN, IKEDA SHINICHI
Year of Publication 04.03.2019
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Year of Publication 04.03.2019
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Optimization of GaN Growth with Ga-Polarity by Referring to Surface Reconstruction Reflection High-Energy Electron Diffraction Patterns
Shen, Xu-Qiang, Ide, Toshihide, Cho, Sung-Hwan, Shimizu, Mitsuaki, Hara, Shiro, Okumura, Hajime, Sonoda, Saki, Shimizu, Saburo
Published in Japanese Journal of Applied Physics (01.01.2001)
Published in Japanese Journal of Applied Physics (01.01.2001)
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Recognition survey of home-visit respiration rehabilitation to the care managers of the region of Fukaya-city, and the activities for improving their awareness
Yamada, Mari, Tanaka, Mariko, Iizuka, Kaori, Abe, Hiroki, Kurashima, Yuria, Takemura, Masao, Hara, Shiro, Suga, Tatsuo, Aoki, Yasuhiro, Maeno, Toshitaka
Published in The Journal of the Japan Society for Respiratory Care and Rehabilitation (01.09.2017)
Published in The Journal of the Japan Society for Respiratory Care and Rehabilitation (01.09.2017)
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Journal Article
Development of a Minimal multi-target helicon sputtering tool
Takahashi, Kazunori, Saito, Taichi, Kawasaki, Hiroyuki, Chiba, Hayato, Yamamoto, Naoyo, Mizuguchi, Hisashi, Inoue, Michihiro, Hara, Shiro
Published in 2018 International Symposium on Semiconductor Manufacturing (ISSM) (01.12.2018)
Published in 2018 International Symposium on Semiconductor Manufacturing (ISSM) (01.12.2018)
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Conference Proceeding
LASER HEAT TREATMENT DEVICE
KANAMORI YOSHIAKI, NAKAYAMA YOSHIYUKI, HARA SHIRO, TERADA MASAO, KUMPUAN SOMAWANG, KASE MASA, TANAKA HIROYUKI, SATO KAZUE, HAMADA KENGO, ISHIDA YUKI, CHIBA TAKASHI
Year of Publication 09.03.2022
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Year of Publication 09.03.2022
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Effects of patients’ education including inhaler technique training by nurses on asthma management
Nakai, Akiko, Aoki, Yasuhiro, Matsuda, Chie, Suzuki, Masafumi, Hara, Shiro, Suga, Tatsuo, Maeno, Toshitaka, Kurabayashi, Masahiko
Published in The Journal of the Japan Society for Respiratory Care and Rehabilitation (30.04.2016)
Published in The Journal of the Japan Society for Respiratory Care and Rehabilitation (30.04.2016)
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