ROTATABLE SUBSTRATE SUPPORT HAVING RADIO FREQUENCY APPLICATOR
KOBAYASHI SATORU, LUBOMIRSKY DMITRY, FLOYD KIRBY H, PARK SOONAM, KENNEY JASON A, HANAWA HIROJI
Year of Publication 13.02.2018
Get full text
Year of Publication 13.02.2018
Patent
ROTATABLE SUBSTRATE SUPPORT HAVING RADIO FREQUENCY APPLICATOR
KOBAYASHI SATORU, LUBOMIRSKY DMITRY, FLOYD KIRBY H, PARK SOONAM, KENNEY JASON A, HANAWA HIROJI
Year of Publication 01.06.2016
Get full text
Year of Publication 01.06.2016
Patent
METHODS OF DIRECTING MAGNETIC FIELDS IN A PLASMA SOURCE AND ASSOCIATED SYSTEMS
ROCHA ALVAREZ JUAN CARLOS, PINSON JAY D. II, HANAWA HIROJI, YE ZHENG JOHN
Year of Publication 14.10.2016
Get full text
Year of Publication 14.10.2016
Patent
POLISHING PAD FOR MONITORING EDDY CURRENT
RAJEEV BAJAJ, MANOOCHER BIRANG, NILS JOHANSSON, FRITZ C REDEKER, HANAWA HIROJI, BOGUSLAW A SWEDEK
Year of Publication 06.11.2014
Get full text
Year of Publication 06.11.2014
Patent
정전 척들을 사용하여 기판들을 클램핑 및 디클램핑하기 위한 방법 및 장치
ROCHA ALVAREZ JUAN CARLOS, KULSHRESHTHA PRASHANT KUMAR, KO ALLEN, DUAN ZIQING, NARASIMHA KARTHIK THIMMAVAJJULA, LEE KWANGDUK DOUGLAS, LIN YONGJING, MANNA PRAMIT, HANAWA HIROJI, KIM BOK HOEN, PADHI DEENESH, YE ZHENG JOHN, TSIANG MICHAEL WENYOUNG, WANG WENJIAO, HAN XINHAI
Year of Publication 18.07.2018
Get full text
Year of Publication 18.07.2018
Patent
GAS DISTRIBUTION SHOWERHEAD WITH HIGH EMISSIVITY SURFACE
MAUNG KYAWWIN, HSU WEI YUNG, CUI JIE, CHUNG HUA, CHEN LIANG YUH, HANAWA HIROJI, BOUR DAVID
Year of Publication 21.08.2013
Get full text
Year of Publication 21.08.2013
Patent
METHOD AND APPARATUS OF PROCESSING WAFERS WITH COMPRESSIVE OR TENSILE STRESS AT ELEVATED TEMPERATURES IN A PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION SYSTEM
ROCHA ALVAREZ JUAN CARLOS, KULSHRESHTHA PRASHANT KUMAR, PINSON JAY D. II, BALASUBRAMANIAN GANESH, ZHOU JIANHUA, PONNEKANTI HARI K, BEHERA SWAYAMBHU P, DUAN REN GUAN, LEE KWANGDUK DOUGLAS, FOSTER JASON K, HANAWA HIROJI, LIN XING, KIM BOK HOEN, HALLER UWE P, YE ZHENG JOHN, HA SUNGWON, SRINIVASAN MUKUND
Year of Publication 18.04.2017
Get full text
Year of Publication 18.04.2017
Patent
APPARATUS FOR VHF IMPEDANCE MATCH TUNING
WONG LAWRENCE, RAMASWAMY KARTIK, HANAWA HIROJI, COLLINS KENNETH S, NGUYEN ANDREW, BANNA SAMER
Year of Publication 10.05.2012
Get full text
Year of Publication 10.05.2012
Patent
METHOD AND APPARATUS FOR INDUCING TURBULENT FLOW OF A PROCESSING CHAMBER CLEANING GAS
MAUNG KYAWWIN, HSU WEI YUNG, OLGADO DONALD J.K, DONG XIZI, KANG, SANG WON, TAM ALEXANDER, CHUNG HUA, QUACH DAVID H, CHANG ANZHONG, HANAWA HIROJI, BOUR DAVID, ACHARYA SUMEDH
Year of Publication 13.12.2013
Get full text
Year of Publication 13.12.2013
Patent
ELECTRICAL CONTROL OF PLASMA UNIFORMITY USING EXTERNAL CIRCUIT
BALAKRISHNA AJIT, RAMASWAMY KARTIK, HANAWA HIROJI, RAUF SHAHID, COLLINS KENNETH S, BERA KALLOL
Year of Publication 10.12.2010
Get full text
Year of Publication 10.12.2010
Patent
REMOVAL OF SURFACE DOPANTS FROM A SUBSTRATE
HILKENE MARTIN A, GALLO BIAGIO, SANTHANAM KARTIK, RAMASWAMY KARTIK, HANAWA HIROJI, FOAD MAJEED A, COLLINS KENNETH S, SCOTNEY CASTLE MATTHEW D
Year of Publication 02.11.2011
Get full text
Year of Publication 02.11.2011
Patent
WORKPIECE SUPPORT FOR A PLASMA REACTOR WITH CONTROLLED APPORTIONMENT OF RF POWER TO A PROCESS KIT RING
LILL THORSTEN B, BUCHBERGER DOUGLAS A. JR, RAMASWAMY KARTIK, HANAWA HIROJI, SHEN MEIHUA, COLLINS KENNETH S, RAUF SHAHID, NGUYEN ANDREW, SUN JENNIFER Y
Year of Publication 21.04.2011
Get full text
Year of Publication 21.04.2011
Patent
REMOVAL OF SURFACE DOPANTS FROM A SUBSTRATE
HILKENE MARTIN A, GALLO BIAGIO, SANTHANAM KARTIK, RAMASWAMY KARTIK, HANAWA HIROJI, FOAD MAJEED A, COLLINS KENNETH S, SCOTNEY CASTLE MATTHEW D
Year of Publication 11.10.2010
Get full text
Year of Publication 11.10.2010
Patent
Rotatable substrate support having radio frequency applicator
Lubomirsky, Dmitry, Hanawa, Hiroji, Kobayashi, Satoru, Floyd, Kirby Hane, Park, Soonam
Year of Publication 29.10.2019
Get full text
Year of Publication 29.10.2019
Patent