Search Results - "HAN SUN SEOK" :: K.UTB vyhledávací portál

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ROTARY TARGET ASSEMBLY FOR SPUTTERING MANUFACTURED BY THE BONDING METHOD AND ROTARY TARGET ASSEMBLY FOR SPUTTERING

by HAN, SUN SEOK
Year of Publication 04.06.2015

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ROTARY FOR SPUTTERING TARGET ASSEMBLY MANUFACTURED BY THE BONDING METHOD FOR ROTARY SPUTTERING TARGET ASSEMBLY AND BONDING METHOD THEREOF

by HAN, SUN SEOK
Year of Publication 07.11.2014

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INDIUM FILLING APPARATUS AND METHOD FOR ROTARY TARGET ASSEMBLY FOR SPUTTERING

by BAE KAP ROK, KIM DONG SO, SHIN GYU SIK, HAN SUN SEOK
Year of Publication 08.03.2019

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SEPARATING METHOD AND SEPARATING APPARATUS OF ROTARY TARGET ASSEMBLY FOR SPUTTERING

by HAN, SUN SEOK, BAE, KAP ROK, SHIN, GYU SIK, KIM, DONG SO
Year of Publication 31.08.2018

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COOLING BASE OF ELECTROSTATIC CHUCK TO RAPIDLY AND EFFECTIVELY CONTROL THERMAL LOAD TRANSFERRED TO ELECTROSTATIC CHUCK

by HAN, SUN SEOK
Year of Publication 07.03.2005

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PROCESS APPARATUS USING PLASMA WHICH INJECTS AND VENTS PROOCESS GAS THROUGH INNER SIDE WALL OF PROCESS CHAMBER, AND METHOD OF PROCESSING A SUBSTRATE USING THE SAME

by HAN, SUN SEOK, LEE, JEONG BEOM
Year of Publication 29.09.2010

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PROCESS APPARATUS USING PLASMA WHICH INJECTS AND VENTS PROOCESS GAS THROUGH INNER SIDE WALL OF PROCESS CHAMBER, AND METHOD OF PROCESSING A SUBSTRATE USING THE SAME

by HAN, SUN SEOK, LEE, JEONG BEOM
Year of Publication 29.09.2010

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RF POWER SUPPLY APPARATUS FOR GENERATING UNIFORM PLASMA

by HAN, SUN SEOK, KIM, MYOUNG SOO
Year of Publication 22.02.2005

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APPARATUS FOR REMOVING RESIDUAL ELECTRIC CHARGES BETWEEN ELECTROSTATIC CHUCK AND SUBSTRATE BY APPLYING POWER HAVING OPPOSITE POLARITY TO ELECTROSTATIC CHUCK AND REMOVING METHOD THEREOF

by HAN, SUN SEOK, KIM, JEONG SIK
Year of Publication 16.12.2004

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LOW COST SLOT VALVE ASSEMBLY WITH PLASMA SHIELD FOR MINIMIZING NON-UNIFORMITY OF SUBSTRATE-PROCESSING

by KO, BU JIN, HAN, SUN SEOK
Year of Publication 23.12.2004

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HYBRID BAR, MANUFACTURING METHOD THEREOF AND STRUCTURE USING THE HYBRID BAR

by HAN, SUN SEOK, JUN, YONG MAN, HAN, GIL YEONG
Year of Publication 06.04.2001

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Vacuum Chuck of Semiconductor Manufacturing Equipment

by HAN, SUN SEOK, LEE, DU RO, LEE, JUN HO
Year of Publication 14.08.2003

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Plasma apparatus and plasma etching method using the same

by HAN, SUN SEOK, KWON, GI CHEONG, BYUN, HONG SIK, KIM, HONG SEUP
Year of Publication 12.06.2003

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air exhaust system of chamber for semiconductor manufacture

by KO, BU JIN, HAN, SUN SEOK, KIM, JEONG SIK
Year of Publication 18.04.2003

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electrostatic chuck and He circulation system for electrostatic chuck

by KO, BU JIN, HAN, SUN SEOK, KIM, JEONG SIK
Year of Publication 26.03.2003

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inductive coupled plasma generation source

by HAN, SUN SEOK, JUN, JAE HONG, KWON, GI CHEONG, LEE, SEUNG WON, CHOI, SEONG HYEOK
Year of Publication 18.04.2003

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INDUCTIVE COUPLED PLASMA APPARATUS

by HAN, SUN SEOK, KWON, GI CHEONG, BYUN, HONG SIK, LEE, CHUNG WON, LEE, SEUNG WON, KIM, HONG SEUP
Year of Publication 23.05.2002

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Electro-static chuck for preventing arc

by KO, BU JIN, HAN, SUN SEOK, KWON, GI CHEONG, BYUN, HONG SIK, LEE, SEUNG WON, KIM, JEONG SIK, KIM, HONG SEUP
Year of Publication 12.03.2003

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Parallel resonance whirl antenna

by KO, BU JIN, HAN, SUN SEOK, KWON, GI CHEONG, BYUN, HONG SIK, LEE, SEUNG WON, KIM, JEONG SIK, KIM, HONG SEUP
Year of Publication 06.01.2003

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PLASMA PROCESSING APPARATUS HAVING VHF PARALLEL RESONANCE ANTENNA

by KO, BU JIN, HAN, SUN SEOK, KWON, GI CHEONG, BYUN, HONG SIK, LEE, SEUNG WON, KIM, JEONG SIK, KIM, HONG SEUP
Year of Publication 31.12.2002

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