Effect of Reactive Ion Etch on the Polishing Selectivity during Silicon Nitride Chemical Mechanical Polishing for Sub-10 nm Logic Device
Han, Jahyung, Shi, Xingzhao, Wu, Changhong, Koli, Dinesh, Kim, Hong Jin
Published in ECS journal of solid state science and technology (01.01.2017)
Published in ECS journal of solid state science and technology (01.01.2017)
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Journal Article
Methods of manufacturing three-dimensional semiconductor devices
KIM KYUNGHYUN, LIM JONGHEUN, YOON BYOUNGMOON, PYO MYUNGJUNG, KIM HYO-JUNG, HAN JAHYUNG
Year of Publication 21.01.2014
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Year of Publication 21.01.2014
Patent
METHODS OF MANUFACTURING THREE-DIMENSIONAL SEMICONDUCTOR DEVICES
KIM KYUNGHYUN, LIM JONGHEUN, YOON BYOUNGMOON, PYO MYUNGJUNG, KIM HYO-JUNG, HAN JAHYUNG
Year of Publication 17.01.2013
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Year of Publication 17.01.2013
Patent