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MONITORING DEVICE, MONITORING SYSTEM AND MONITORING METHOD

MONITORING DEVICE, MONITORING SYSTEM AND MONITORING METHOD

by HAMAMURA Yuichi, MATSUI Takaharu, IMAZAWA Kei
Year of Publication 04.05.2017

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Patent

PATTERN OBSERVATION DEVICE, RECIPE PRODUCTION DEVICE, AND RECIPE PRODUCTION METHOD

PATTERN OBSERVATION DEVICE, RECIPE PRODUCTION DEVICE, AND RECIPE PRODUCTION METHOD

by HAMAMURA, YUICHI, SAKAI, TSUNEHIRO
Year of Publication 02.08.2012

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Patent

METHOD OF EVALUATING SYSTEMATIC DEFECT, AND APPARATUS THEREFOR

METHOD OF EVALUATING SYSTEMATIC DEFECT, AND APPARATUS THEREFOR

by HAMAMURA YUICHI, TAKAGI YUJI
Year of Publication 12.04.2012

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Patent

OPERATOR QUALITY CONTROL METHOD AND OPERATOR QUALITY MANAGEMENT DEVICE

OPERATOR QUALITY CONTROL METHOD AND OPERATOR QUALITY MANAGEMENT DEVICE

by FUKAYA YUSAKU, TANAKA SHIGENORI, HAMAMURA YUICHI, IMAZAWA KEI, TADA KOICHIRO, MOMOSE ISAMU
Year of Publication 01.09.2016

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Patent

METHOD OF SELECTING AND PROCESSING OBSERVATION DEFECTS, METHOD OF OBSERVING DEFECTS, DEVICE FOR SELECTING AND PROCESSING OBSERVATION DEFECTS, AND DEVICE FOR OBSERVING DEFECTS

METHOD OF SELECTING AND PROCESSING OBSERVATION DEFECTS, METHOD OF OBSERVING DEFECTS, DEVICE FOR SELECTING AND PROCESSING OBSERVATION DEFECTS, AND DEVICE FOR OBSERVING DEFECTS

by HAMAMURA, YUICHI, TAKAGI, YUUJI, HARADA, MINORU
Year of Publication 04.11.2010

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Patent

RECIPE GENERATING DEVICE, INSPECTION ASSISTING DEVICE, INSPECTION SYSTEM, AND RECORDING MEDIUM

RECIPE GENERATING DEVICE, INSPECTION ASSISTING DEVICE, INSPECTION SYSTEM, AND RECORDING MEDIUM

by NAKAGAKI RYO, TANDAI YUTAKA, ENOMOTO YUJI, HAMAMURA YUICHI, SAKAI TSUNEHIRO, HASUMI KAZUHISA
Year of Publication 12.03.2014

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Patent

RECIPE GENERATING DEVICE, INSPECTION ASSISTING DEVICE, INSPECTION SYSTEM, AND RECORDING MEDIUM

RECIPE GENERATING DEVICE, INSPECTION ASSISTING DEVICE, INSPECTION SYSTEM, AND RECORDING MEDIUM

by NAKAGAKI, RYO, HASUMI, KAZUHISA, HAMAMURA, YUICHI, TANDAI, YUTAKA, SAKAI, TSUNEHIRO, ENOMOTO, YUJI
Year of Publication 07.02.2013

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Patent

Advanced Method for Defect Characterization Using Fail Bit Analysis and Critical Area Simulation

Advanced Method for Defect Characterization Using Fail Bit Analysis and Critical Area Simulation

by Matsumoto, C, Hamamura, Y, Chida, T, Tsunoda, Y, Go, Naoki, Uozaki, H, Miyazaki, I, Kamohara, S, Kaneko, Y, Kanamitsu, K
Published in IEEE transactions on semiconductor manufacturing (01.05.2011)

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Journal Article Conference Proceeding

METHOD OF PREDICTING FRACTION DEFECTIVE, PROGRAM OF PREDICTING FRACTION DEFECTIVE, METHOD OF CONTROLLING SEMICONDUCTOR MANUFACTURING DEVICE, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

METHOD OF PREDICTING FRACTION DEFECTIVE, PROGRAM OF PREDICTING FRACTION DEFECTIVE, METHOD OF CONTROLLING SEMICONDUCTOR MANUFACTURING DEVICE, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

by HAMAMURA, YUICHI, TSUNODA, YOSHIYUKI, TSUNOKUNI, KAZUYUKI, MATSUMOTO, CHIZU
Year of Publication 25.03.2010

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Patent

DEFECT IMAGE PROCESSING APPARATUS, DEFECT IMAGE PROCESSING METHOD, SEMICONDUCTOR DEFECT CLASSIFYING APPARATUS, AND SEMICONDUCTOR DEFECT CLASSIFYING METHOD

DEFECT IMAGE PROCESSING APPARATUS, DEFECT IMAGE PROCESSING METHOD, SEMICONDUCTOR DEFECT CLASSIFYING APPARATUS, AND SEMICONDUCTOR DEFECT CLASSIFYING METHOD

by FUNAKOSHI TOMOHIRO, TANDAI YUTAKA, ISHIKAWA TAMAO, HAMAMURA YUICHI, ICHINOSE KATSUHIKO, KURIHARA SHIGEKI, ISOGAI SEIJI, SAKAI TSUNEHIRO
Year of Publication 09.12.2010

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Patent

Method of evaluating systematic defect, and apparatus therefor

Method of evaluating systematic defect, and apparatus therefor

by HAMAMURA YUICHI, TAKAGI YUJI
Year of Publication 31.12.2013

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Patent

PATTERN REVIEW TOOL, RECIPE MAKING TOOL, AND METHOD OF MAKING RECIPE

PATTERN REVIEW TOOL, RECIPE MAKING TOOL, AND METHOD OF MAKING RECIPE

by HAMAMURA YUICHI, SAKAI TSUNEHIRO
Year of Publication 24.10.2013

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Patent

METHOD OF EVALUATING SYSTEMATIC DEFECT, AND APPARATUS THEREFOR

METHOD OF EVALUATING SYSTEMATIC DEFECT, AND APPARATUS THEREFOR

by HAMAMURA YUICHI, TAKAGI YUJI
Year of Publication 25.07.2013

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Patent

An advanced defect-monitoring test structure for electrical screening and defect localization

An advanced defect-monitoring test structure for electrical screening and defect localization

by Hamamura, Y., Kumazawa, T., Tsunokuni, K., Sugimoto, A., Asakura, H.
Published in IEEE transactions on semiconductor manufacturing (01.05.2004)

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Journal Article

PROBE DRIVING METHOD, AND PROBE APPARATUS

PROBE DRIVING METHOD, AND PROBE APPARATUS

by SEKIHARA, ISAMU, KOIKE, HIDEMI, TOMIMATSU, SATOSHI, HAMAMURA, YUICHI, SUGIMOTO, ARITOSHI, AZUMA, JUNZO, ISHITANI, TOHRU, SHIMASE, AKIRA
Year of Publication 31.01.2002

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Patent

PATTERN OBSERVATION APPARATUS, RECIPE PREPARATION APPARATUS, AND RECIPE PREPARATION METHOD

PATTERN OBSERVATION APPARATUS, RECIPE PREPARATION APPARATUS, AND RECIPE PREPARATION METHOD

by HAMAMURA YUICHI, SAKAI TSUNEHIRO
Year of Publication 16.08.2012

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Patent

Method and apparatus for work quality control

Method and apparatus for work quality control

by Hamamura, Yuichi, Tada, Kouichirou, Momose, Isamu, Tanaka, Shigenori, Fukaya, Yusaku, Imazawa, Kei
Year of Publication 07.04.2020

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Patent

METHOD AND APPARATUS FOR DETERMINING SYSTEMATIC DEFECT

METHOD AND APPARATUS FOR DETERMINING SYSTEMATIC DEFECT

by HAMAMURA YUICHI, TAKAGI YUJI
Year of Publication 19.04.2012

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Patent

Reviewed defect selection processing method, defect review method, reviewed defect selection processing tool, and defect review tool

Reviewed defect selection processing method, defect review method, reviewed defect selection processing tool, and defect review tool

by HARADA MINORU, HAMAMURA YUICHI, TAKAGI YUJI
Year of Publication 18.03.2014

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Patent

SIMULATION SYSTEM, SIMULATION PROGRAM, AND SIMULATION METHOD

SIMULATION SYSTEM, SIMULATION PROGRAM, AND SIMULATION METHOD

by MATSUMOTO CHIZURU, HAMAMURA YUICHI
Year of Publication 06.09.2007

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Patent

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