Method of forming a metal oxide film and microwave power source device used for the above method
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Year of Publication 07.12.2010
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Year of Publication 07.12.2010
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VAPOR DEPOSITED FILM BY PLASMA CVD METHOD
INAGAKI HAJIME, KITOU SATORU, NAKAYAMA MEGUMI, NAKANO RYUTA, IEKI TOSHIHIDE
Year of Publication 20.11.2007
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Year of Publication 20.11.2007
Patent