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Year of Publication 15.02.2007
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Semiconductor structure with multiple bottom anti-reflective coating layer and method of forming photoresist pattern and pattern of semiconductor device using the same structure
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Photolabile compound, oligomer probe array and substrate, and manufacturing method of the same
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Year of Publication 12.10.2011
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SEMICONDUCTOR STRUCTURE COMPRISING MULTIPLE BARC AND METHOD OF SHAPING PR PATTERN AND METHOD OF SHAPING PATTERN OF SEMICONDUCTOR DEVICE USING THE SAME STRUCTURE
RYOO, MAN HYOUNG, HAH, JUNG HWAN, CHAE, YUN SOOK, KANG, CHANG JIN, CHO, HAN KU, JUNG, YOUNG JAE, WOO, SANG GYUN
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Biosensor mit Transistorkanal im Nanobereich
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Year of Publication 23.04.2009
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