Search Results - "HAGIO, YOSHINORI" :: K.UTB vyhledávací portál | TBU Library Retrieval Portal

Overlay improvement for semiconductor manufacturing using Moiré effect

Overlay improvement for semiconductor manufacturing using Moiré effect

by Hagio, Yoshinori, Kasa, Kentaro, Kawadahara, Sho, Takakuwa, Manabu, Takahata, Yosuke, Kato, Katsuya, Nakae, Akihiro
Published in 2020 31st Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.08.2020)

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Conference Proceeding

Interface Properties between Ni and p-GaN Studied by Photoemission Spectroscopy

Interface Properties between Ni and p-GaN Studied by Photoemission Spectroscopy

by Hagio, Yoshinori, Sugahara, Hideo, Maruyama, Takahiro, Nanishi, Yasushi, Akimoto, Katsuhiro, Miyajima, Takao, Kijima, Satoru
Published in Japanese Journal of Applied Physics (01.01.2002)

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Journal Article

Novel overlay correction by synchronizing scan speed to intra-die fingerprint on lithography scanner

Novel overlay correction by synchronizing scan speed to intra-die fingerprint on lithography scanner

by Hamasaki, Masakazu, Hagio, Yoshinori, Kasa, Kentaro, Kato, Yoshimitsu, Takakuwa, Manabu, Obata, Tsutomu, Nakao, Shunichi, Miyake, Manabu, Kato, Katsuya, Takahata, Yosuke, Nakae, Akihiro
Published in 2020 31st Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.08.2020)

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Conference Proceeding

STATE MONITORING DEVICE FOR RAILWAY VEHICLE

STATE MONITORING DEVICE FOR RAILWAY VEHICLE

by MATSUMI TAKANORI, LIN SHIHPIN, HAGIO YOSHINORI, SUDA YOSHIHIRO, CHOMPITAKPON TAGUN, NISHIOKA KOJI
Year of Publication 22.08.2019

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Patent

RAILWAY VEHICLE

RAILWAY VEHICLE

by NAKAI, TAKUJI, SHIMOKAWA, YOSHIYUKI, KIKKO, SATOSHI, HAGIO, YOSHINORI
Year of Publication 09.06.2016

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Patent

RAILROAD VEHICLE CARRIAGE

RAILROAD VEHICLE CARRIAGE

by NAKAI, TAKUJI, SHIMOKAWA, YOSHIYUKI, KIKKO, SATOSHI, HAGIO, YOSHINORI
Year of Publication 24.12.2014

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Patent

BOGIE FRAME FOR RAILWAY VEHICLE

BOGIE FRAME FOR RAILWAY VEHICLE

by SAWADA, MASANORI, TOKUNAGA, SATOSHI, HAGIO, YOSHINORI, FUTAGAWA, KAZUHIKO
Year of Publication 28.11.2013

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Patent

Alignment mark formation method and semiconductor device

Alignment mark formation method and semiconductor device

by Hagio Yoshinori
Year of Publication 22.11.2016

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Patent

ALIGNMENT MARK FORMATION METHOD AND SEMICONDUCTOR DEVICE

ALIGNMENT MARK FORMATION METHOD AND SEMICONDUCTOR DEVICE

by HAGIO Yoshinori
Year of Publication 15.09.2016

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Patent

Alignment mark, photomask, and method for forming alignment mark

Alignment mark, photomask, and method for forming alignment mark

by HAGIO YOSHINORI
Year of Publication 15.09.2015

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Patent

ALIGNMENT MARK, PHOTOMASK, AND METHOD FOR FORMING ALIGNMENT MARK

ALIGNMENT MARK, PHOTOMASK, AND METHOD FOR FORMING ALIGNMENT MARK

by HAGIO YOSHINORI
Year of Publication 08.01.2015

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Patent

MEASUREMENT APPARATUS, MEASUREMENT METHOD, AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE

MEASUREMENT APPARATUS, MEASUREMENT METHOD, AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE

by KOMINE Nobuhiro, HAGIO Yoshinori
Year of Publication 29.12.2016

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Patent

Method for measuring pattern misalignment

Method for measuring pattern misalignment

by OKAMOTO YOSUKE, HAGIO YOSHINORI
Year of Publication 26.01.2016

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Patent

EUV mask

EUV mask

by OKAMOTO YOSUKE, HAGIO YOSHINORI
Year of Publication 29.09.2015

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Patent

RAILWAY VEHICLE

RAILWAY VEHICLE

by KIKKO, Satoshi, SHIMOKAWA, Yoshiyuki, NAKAI, Takuji, HAGIO, Yoshinori
Year of Publication 03.02.2021

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Patent

Pattern forming method, positional deviation measuring method and photomask

Pattern forming method, positional deviation measuring method and photomask

by OKAMOTO YOSUKE, HAGIO YOSHINORI
Year of Publication 14.10.2014

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Patent

METHOD FOR MEASURING PATTERN MISALIGNMENT

METHOD FOR MEASURING PATTERN MISALIGNMENT

by OKAMOTO YOSUKE, HAGIO YOSHINORI
Year of Publication 25.09.2014

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Patent

RAILROAD VEHICLE CARRIAGE

RAILROAD VEHICLE CARRIAGE

by KIKKO, Satoshi, SHIMOKAWA, Yoshiyuki, NAKAI, Takuji, HAGIO, Yoshinori
Year of Publication 12.02.2020

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Patent

EUV EXPOSURE APPARATUS, EUV MASK, AND METHOD OF MEASURING DISTORTION

EUV EXPOSURE APPARATUS, EUV MASK, AND METHOD OF MEASURING DISTORTION

by OKAMOTO YOSUKE, HAGIO YOSHINORI
Year of Publication 10.07.2014

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Patent

PATTERN FORMING METHOD, POSITIONAL DEVIATION MEASURING METHOD AND PHOTOMASK

PATTERN FORMING METHOD, POSITIONAL DEVIATION MEASURING METHOD AND PHOTOMASK

by OKAMOTO YOSUKE, HAGIO YOSHINORI
Year of Publication 06.03.2014

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Patent