MIRROR DEVICE
HAUF MARKUS, SAROV YANKO, HAACKER FABIAN, HOLZ MARKUS, WENGLER MARK CHRISTOF
Year of Publication 28.08.2017
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Year of Publication 28.08.2017
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METHOD FOR ILLUMINATING AN OBJECT FIELD OF A PROJECTION EXPOSURE SYSTEM
ENDRES MARTIN, HAUF MARKUS, EISENMENGER JOHANNES, WISCHMEIER LARS, BIELING STIG, HAACKER FABIAN
Year of Publication 28.10.2016
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Year of Publication 28.10.2016
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MIRROR ARRAY
HAUF MARKUS, ENDRES MARTIN, WISCHMEIER LARS, EISENMENGER JOHANNES, BIELING STIG, HAACKER FABIAN
Year of Publication 26.10.2016
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Year of Publication 26.10.2016
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MULTI-MIRROR ARRAY
DINGER, Udo, EHM, Dirk, SCHÖLL, Achim, HAACKER, Fabian, SAROV, Yanko, BECKER, Moritz, SCHMIDT, Stefan Wolfgang
Year of Publication 21.08.2024
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Year of Publication 21.08.2024
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MULTI-MIRROR ARRAY
Ehm, Dirk, Becker, Moritz, Schöll, Achim, Sarov, Yanko, Dinger, Udo, Haacker, Fabian, Schmidt, Stefan Wolfgang
Year of Publication 25.07.2024
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Year of Publication 25.07.2024
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MECHATRONIC ELEMENT, MIRROR, MIRROR ARRANGEMENT AND METHOD FOR PRODUCTION OF SAME
BROCH, Katharina, DEPPISCH, Sandra, ENKISCH, Hartmut, HAACKER, Fabian, SAROV, Yanko
Year of Publication 22.08.2024
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Year of Publication 22.08.2024
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Mechatronisches Element, Spiegel, Spiegelanordnung sowie Verfahren zu deren Herstellung
Broch, Katharina, Haschke, Sandra, Sarov, Yanko, Haacker, Fabian, Enkisch, Hartmut
Year of Publication 22.08.2024
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Year of Publication 22.08.2024
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Optical component
Knauf Benedikt, Holz Markus, Sigel Benjamin, Haacker Fabian, Horn Jan
Year of Publication 26.12.2017
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Year of Publication 26.12.2017
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Method for illuminating an object field of a projection exposure system
Eisenmenger, Johannes, Hauf, Markus, Bieling, Stig, Haacker, Fabian, Wischmeier, Lars, Endres, Martin
Year of Publication 10.09.2019
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Year of Publication 10.09.2019
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MIRROR DEVICE
Wengler Christof, Hauf Markus, Sarov Yanko, Holz Markus, Haacker Fabian
Year of Publication 28.09.2017
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Year of Publication 28.09.2017
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Mirror device
Hauf, Markus, Sarov, Yanko, Haacker, Fabian, Holz, Markus, Wengler, Mark Christof
Year of Publication 16.10.2018
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Year of Publication 16.10.2018
Patent
MIRROR DEVICE
HAUF, Markus, HAACKER, Fabian, SAROV, Yanko, WENGLER, Mark Christof, HOLZ, Markus
Year of Publication 10.10.2018
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Year of Publication 10.10.2018
Patent