Piezoelectrically and Capacitively Transduced Hybrid MEMS Resonator with Superior RF Performance and Enhanced Parasitic Mitigation by Low-Temperature Batch Fabrication
Zaman, Adnan, Guneroglu, Ugur, Alsolami, Abdulrahman, Wang, Jing
Published in Applied sciences (01.09.2024)
Published in Applied sciences (01.09.2024)
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