Investigation of the metrological characteristics of a scanning probe measuring microscope using TGZ type calibration gratings
Gogolinskii, K. V., Gubskii, K. L., Kuznetsov, A. P., Reshetov, V. N., Maslenikov, I. I., Golubev, S. S., Lysenko, V. G., Rumyantsev, S. I.
Published in Measurement techniques (01.07.2012)
Published in Measurement techniques (01.07.2012)
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Journal Article
Nanometrology and features of metrological assurance of measurements of the roughness and relief parameters of nanostructured surfaces
Lysenko, V. G., Soloviov, V. V., Luskinovich, P. N., Zolotarevskii, S. Yu, Gubskii, K. L.
Published in Measurement techniques (01.02.2011)
Published in Measurement techniques (01.02.2011)
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Journal Article