An EpoClad/EpoCore-based platform for MOEMS fabrication
Guan, Tiannan, Ceyssens, Frederik, Puers, Robert
Published in Journal of micromechanics and microengineering (01.12.2013)
Published in Journal of micromechanics and microengineering (01.12.2013)
Get full text
Journal Article
정전 홀더, 대상물 테이블 및 리소그래피 장치
ENGELEN JOHANNES BERNARDUS CHARLES, TEUNISSEN MARCEL MARIA CORNELIUS FRANCISCUS, HUANG ZHUANGXIONG, NAKIBOGLU GUENES, TRALLI ALDO, BRULS RICHARD JOSEPH, VAN DER MEULEN FRITS, KRUIZINGA MATTHIAS, VAN GILS PETRUS JACOBUS MARIA, GUAN TIANNAN, DE VRIES SJOERD FRANS
Year of Publication 12.04.2024
Get full text
Year of Publication 12.04.2024
Patent
OBJECT HOLDER COMPRISING AN ELECTROSTATIC CLAMP
VAN GILS, Petrus, GUAN, Tiannan, MEULENDIJKS, Antonius, VERSCHUREN, Marinus
Year of Publication 10.09.2020
Get full text
Year of Publication 10.09.2020
Patent
ELECTROSTATIC HOLDER, OBJECT TABLE AND LITHOGRAPHIC APPARATUS
HUANG, Zhuangxiong, KRUIZINGA, Matthias, DE VRIES, Sjoerd, BRULS, Richard, VAN GILS, Petrus, ENGELEN, Johannes, TRALLI, Aldo, NAKIBOGLU, Günes, TEUNISSEN, Marcel, GUAN, Tiannan, VAN DER MEULEN, Frits
Year of Publication 16.02.2023
Get full text
Year of Publication 16.02.2023
Patent
ELECTROSTATIC HOLDER, OBJECT TABLE AND LITHOGRAPHIC APPARATUS
TEUNISSEN, Marcel, Maria, Cornelius, Franciscus, DE VRIES, Sjoerd, Frans, HUANG, Zhuangxiong, KRUIZINGA, Matthias, BRULS, Richard, Joseph, VAN GILS, Petrus, Jacobus, Maria, TRALLI, Aldo, ENGELEN, Johannes, Bernardus, Charles, NAKIBOGLU, Günes, GUAN, Tiannan, VAN DER MEULEN, Frits
Year of Publication 15.02.2023
Get full text
Year of Publication 15.02.2023
Patent