Plasma diagnostics in pulsed plasma doping (P/sup 2/LAD) system
Bon-Woong Koo, Ziwei Fang, Godet, L., Radovanov, S.B., Cardinaud, C., Cartry, G., Grouillet, A., Lenoble, D.
Published in IEEE transactions on plasma science (01.04.2004)
Published in IEEE transactions on plasma science (01.04.2004)
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Journal Article
Conference Proceeding
The Design and Fabrication of 0.35 µm Single-Polysilicon Self-Aligned Bipolar Transistors
Chantre, Alain, Gravier, Thierry, Niel, Stéphan, Kirtsch, Jean, Granier, André, Grouillet, André, Guillermet, Marc, Maury, Delphine, Pantel, Roland, Regolini, Jorge Luis, Vincent, Gilbert
Published in Japanese Journal of Applied Physics (01.04.1998)
Published in Japanese Journal of Applied Physics (01.04.1998)
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Journal Article
Method of making MOS transistor with high doping gradient under the gate
Papadas, Constantin, Regolini, Jorge L, Skotnicki, Thomas, Grouillet, André, Morin, Christine
Year of Publication 15.10.2002
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Year of Publication 15.10.2002
Patent
Method of making MOS transistor with high doping gradient under the gate
SKOTNICKI THOMAS, REGOLINI JORGE L, PAPADAS CONSTANTIN, GROUILLET ANDRE, MORIN CHRISTINE
Year of Publication 15.10.2002
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Year of Publication 15.10.2002
Patent
MOS TRANSISTOR WITH HIGH DOPING GRADIENT UNDER THE GRID
REGOLINI, JORGE, L, PAPADAS, CONSTANTIN, MORIN, CHRISTINE, GROUILLET, ANDRE, SKOTNICKI, THOMAS
Year of Publication 26.01.2000
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Year of Publication 26.01.2000
Patent