Electrical properties of quaternary HfAlTiO thin films grown by atomic layer deposition
Alekhin, A.P., Chouprik, A.A., Grigal, I.P., Gudkova, S.A., Lebedinskii, Yu.Yu, Markeev, A.M., Zaitsev, S.A.
Published in Thin solid films (01.05.2012)
Published in Thin solid films (01.05.2012)
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