Hermetic wafer-level packaging for RF MEMs: Effects on resonator performance
Henry, M. D., Greth, K. D., Nguyen, J., Nordquist, C. D., Shul, R., Wiwi, M., Plut, T. A., Olsson, R. H.
Published in 2012 IEEE 62nd Electronic Components and Technology Conference (01.05.2012)
Published in 2012 IEEE 62nd Electronic Components and Technology Conference (01.05.2012)
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