Chip-scale modules for high-level integration in the 21st century
Gregus, Jeffrey A., Lau, Maureen Y., Degani, Yinon, Tai, King L.
Published in Bell Labs technical journal (01.07.1998)
Published in Bell Labs technical journal (01.07.1998)
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Journal Article
Low-temperature plasma etching of GaAs, AlGaAs, and AlAs
GREGUS, J. A, VERNON, M. F, GOTTSCHO, R. A, SCHELLER, G. R, HOBSON, W. S, OPILA, R. L, YOON, E
Published in Plasma chemistry and plasma processing (01.09.1993)
Published in Plasma chemistry and plasma processing (01.09.1993)
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Journal Article
Chip-scale modules for high-level integration in the 21 super(st) century
Gregus, Jeffrey A, Lau, Maureen Y, Degani, Yinon, Tai, King L
Published in Bell Labs technical journal (01.07.1998)
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Published in Bell Labs technical journal (01.07.1998)
Journal Article
Method for controlling plasma processes
GOTTSCHO; RICHARD A, AYDIL; ERAY S, JARNYK; MARK A, GREGUS; JEFFREY A
Year of Publication 11.01.1994
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Year of Publication 11.01.1994
Patent
Real-time, In Situ Monitoring Of Semiconductor Processing
Gottscho, R.A., Aydil, E.S., Giapis, K.P., Gregus, J.A., Euijoun Youn, Hayes, T.R., Vernon, M.F., Chakrabarti, U.K.
Published in LEOS '92 Conference Proceedings (1992)
Published in LEOS '92 Conference Proceedings (1992)
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Conference Proceeding
Method for controlling plasma processes
GOTTSCHO RICHARD ALAN, GREGUS JEFFREY ALAN, AYDIL ERAY SACIT, JARNYK MARK ANDREW
Year of Publication 11.07.1998
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Year of Publication 11.07.1998
Patent