고체 화학 기화 챔버용 압축 가능한 트레이
SCHINDLER JAMES, NAITO DONN K, OLSON BENJAMIN H, PARKER CHASE, GREGG JOHN N, BATTLE SCOTT L, THOMAS JACOB, HENDRIX BRYAN C
Year of Publication 17.05.2024
Get full text
Year of Publication 17.05.2024
Patent
SOURCE REAGENT-BASED DELIVERY OF FLUID WITH HIGH MATERIAL FLUX FOR BATCH DEPOSITION
NAITO DONN K, BARTOSH KYLE, CLEARY JOHN M, CHEON SEBUM, GREGG JOHN N, HODGES JORDAN, BATTLE SCOTT L, HENDRIX BRYAN C
Year of Publication 07.06.2023
Get full text
Year of Publication 07.06.2023
Patent
SOURCE REAGENT-BASED DELIVERY OF FLUID WITH HIGH MATERIAL FLUX FOR BATCH DEPOSITION
NAITO DONN K, BARTOSH KYLE, CLEARY JOHN M, CHEON SEBUM, GREGG JOHN N, HODGES JORDAN, BATTLE SCOTT L, HENDRIX BRYAN C
Year of Publication 03.11.2020
Get full text
Year of Publication 03.11.2020
Patent