The effect of surface treatments and growth conditions on electrical characteristics of thick (>50 nm) gate oxides
WU, C.-T, RIDLEY, R, ROMAN, P, DOLNY, G, GREBS, T, HAO, J, RUZYLLO, J
Published in Journal of the Electrochemical Society (01.09.2001)
Published in Journal of the Electrochemical Society (01.09.2001)
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Journal Article
Effect of nitridation on the reliability of thick gate oxides
Wu, C.-T., Mieckowski, A., Ridley, R.S., Dolny, G., Grebs, T., Linn, J., Ruzyllo, J.
Published in Microelectronics and reliability (2003)
Published in Microelectronics and reliability (2003)
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Journal Article
An ultra dense trench-gated power MOSFET technology using a self-aligned process
Jun Zeng, Dolny, G., Kocon, C., Stokes, R., Kraft, N., Brush, L., Grebs, T., Jifa Hao, Ridley, R., Benjamin, J., Skurkey, L., Benczkowski, S., Semple, D., Wodarczyk, P., Rexer, C.
Published in Proceedings of the 13th International Symposium on Power Semiconductor Devices & ICs. IPSD '01 (IEEE Cat. No.01CH37216) (2001)
Published in Proceedings of the 13th International Symposium on Power Semiconductor Devices & ICs. IPSD '01 (IEEE Cat. No.01CH37216) (2001)
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Conference Proceeding
The impact of trench geometry and processing on the performance and reliability of low voltage power UMOSFETs
Suliman, S.A., Gallogunta, N., Trabzon, L., Hao, J., Dolny, G., Ridley, R., Grebs, T., Benjamin, J., Kocon, C., Zeng, J., Knoedler, C.M., Horn, M., Awadelkarim, O.O., Fonash, S.J., Ruzyllo, J.
Published in 2001 IEEE International Reliability Physics Symposium Proceedings. 39th Annual (Cat. No.00CH37167) (2001)
Published in 2001 IEEE International Reliability Physics Symposium Proceedings. 39th Annual (Cat. No.00CH37167) (2001)
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Conference Proceeding
Characterization of gate oxide degradation mechanisms in trench-gated power MOSFETs using the charge-pumping technique
Dolny, G., Gollagunta, N., Suliman, S., Trabzon, L., Horn, M., Awadelkarim, O.O., Fonash, S.J., Knoedler, C.M., Hao, J., Ridley, R., Kocon, C., Grebs, T., Zeng, J.
Published in Proceedings of the 13th International Symposium on Power Semiconductor Devices & ICs. IPSD '01 (IEEE Cat. No.01CH37216) (2001)
Published in Proceedings of the 13th International Symposium on Power Semiconductor Devices & ICs. IPSD '01 (IEEE Cat. No.01CH37216) (2001)
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Conference Proceeding
Growth and reliability of thick gate oxide in U-trench for power MOSFETs
Wu, C.-T., Ridley, R.S., Dolny, G., Grebs, T., Knoedler, C., Suliman, S., Venkataraman, B., Awadelkarim, O., Ruzyllo, J.
Published in Proceedings of the 14th International Symposium on Power Semiconductor Devices and Ics (2002)
Published in Proceedings of the 14th International Symposium on Power Semiconductor Devices and Ics (2002)
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Conference Proceeding
The implementation of AFM for process monitoring and metrology in trench MOSFET device manufacturing
Ridley, R.S., Strate, C., Cumbo, J., Grebs, T., Gasser, C.
Published in 13th Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference. Advancing the Science and Technology of Semiconductor Manufacturing. ASMC 2002 (Cat. No.02CH37259) (2002)
Published in 13th Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference. Advancing the Science and Technology of Semiconductor Manufacturing. ASMC 2002 (Cat. No.02CH37259) (2002)
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Conference Proceeding
The effect of charge in junction termination extension passivation dielectrics
Trost, J.R., Ridley, R.S., Khan, M.K., Grebs, T., Evans, H., Arthur, S.
Published in 11th International Symposium on Power Semiconductor Devices and ICs. ISPSD'99 Proceedings (Cat. No.99CH36312) (1999)
Published in 11th International Symposium on Power Semiconductor Devices and ICs. ISPSD'99 Proceedings (Cat. No.99CH36312) (1999)
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Conference Proceeding
Yield enhancement: reduction in defect density with improvement in the photolithography process
Livsey, S.C., Grebs, T., Hoffman, C.R.
Published in 10th Annual IEEE/SEMI. Advanced Semiconductor Manufacturing Conference and Workshop. ASMC 99 Proceedings (Cat. No.99CH36295) (1999)
Published in 10th Annual IEEE/SEMI. Advanced Semiconductor Manufacturing Conference and Workshop. ASMC 99 Proceedings (Cat. No.99CH36295) (1999)
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Conference Proceeding
Advanced aqueous wafer cleaning in power semiconductor device manufacturing
Ridley, R.S., Grebs, T., Trost, J., Webb, R., Schuler, M., Longenberger, R.F., Fenstemacher, T., Caravaggio, M.
Published in IEEE/SEMI 1998 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop (Cat. No.98CH36168) (1998)
Published in IEEE/SEMI 1998 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop (Cat. No.98CH36168) (1998)
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Conference Proceeding
Field plate arrangement for trench gate field effect transistor
CHEN YAPING, LEE MENGIA, YANG HONG, GREBS THOMAS EUGENE, JIN CHENGLONG
Year of Publication 21.03.2023
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Year of Publication 21.03.2023
Patent
Vertical trench gate FET with split gate
KIM SEIYON, YANG HANBIAO, SRIDHAR SEETHARAMAN, LEE MINGIEH, GREBS THOMAS EDWARD
Year of Publication 19.07.2022
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Year of Publication 19.07.2022
Patent
Package for electronic system having semiconductor chips
MOLLOY SIMON JOHN, LOPEZ OSVALDO JORGE, GREBS THOMAS EUGENE, NOQUIL JONATHAN ALMERIA
Year of Publication 18.08.2017
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Year of Publication 18.08.2017
Patent
Silicon package for embedded semiconductor chip and power converter
GREBS TOM, MOLLOY SIMON JOHN, LOPEZ OSVALDO JORGE, NOQUIL JONATHAN ALMERIA
Year of Publication 18.08.2017
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Year of Publication 18.08.2017
Patent