Thin films in the integrated circuit industry: requirements and deposition methods
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Conference Proceeding
Recovery of vacuum ultraviolet irradiated metal-oxide-silicon systems
Druijf, K. G., de Nijs, J. M. M., van der Drift, E., Granneman, E. H. A., Balk, P.
Published in Journal of applied physics (01.07.1995)
Published in Journal of applied physics (01.07.1995)
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The microscopic nature of donor-type Si-SiO2 interface states
DRUIJF, K. G, DE NIJS, J. M. M, DRIFT, E. V. D, AFANAS'EV, V. V, GRANNEMAN, E. H. A, BALK, P
Published in Journal of non-crystalline solids (01.07.1995)
Published in Journal of non-crystalline solids (01.07.1995)
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Charge exchange mechanisms of slow states in Si/SiO2
Druijf, K.G., de Nijs, J.M.M., van der Drift, E., Granneman, E.H.A., Balk, P.
Published in Microelectronic engineering (01.08.1993)
Published in Microelectronic engineering (01.08.1993)
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H − Formation in proton-metal collisions
Geerlings, J.J.C., Van Amersfoort, P.W., Kwakman, L.F.Tz, Granneman, E.H.A., Los, J., Gauyacq, J.P.
Published in Surface science (01.07.1985)
Published in Surface science (01.07.1985)
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The scattering of hydrogen from a cesiated tungsten surface
Van Wunnik, J.N.M, Geerlings, J.J.C., Granneman, E.H.A., Los, J.
Published in Surface science (01.08.1983)
Published in Surface science (01.08.1983)
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Quantification of Si3N4 LPCVD inhibition on oxide surfaces
KWAKMAN, L. F. T, LINDOW, E. J, GRANNEMAN, E. H. A, MARTIN, F, VELER, J. C, JOLY, J. P
Published in Applied surface science (02.06.1993)
Published in Applied surface science (02.06.1993)
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A magnetic multipole reactor for high-flux reactive-ion etching
KUYPERS, A. D, GRANNEMAN, E. H. A, HOPMAN, H. J
Published in Journal of applied physics (15.03.1988)
Published in Journal of applied physics (15.03.1988)
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Low temperature copper de-oxidation
Funk, K., v Zutphen, A., Granneman, E.H.A.
Published in 2005 13th International Conference on Advanced Thermal Processing of Semiconductors (2005)
Published in 2005 13th International Conference on Advanced Thermal Processing of Semiconductors (2005)
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Conference Proceeding
The role of cesium-ion bombardment in the formation of negative hydrogen ions on a converter surface
VAN OS, C. F. A, GRANNEMAN, E. H. A, VAN AMERSFOORT, P. W
Published in Journal of applied physics (01.06.1987)
Published in Journal of applied physics (01.06.1987)
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Matching of a cylindrical ion beam to a periodic quadrupole channel
Siebenlist, F., Thomae, R.W., Van Amersfoort, P.W., Schonewille, F.G., Granneman, E.H.A., Klein, H., Schempp, A., Weis, T.
Published in Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment (01.05.1987)
Published in Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment (01.05.1987)
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Multichannel acceleration of intense, low-energy ion beams
THOMAE, R. W, SIEBENLIST, F, VAN AMERSFOORT, P. W, GRANNEMAN, E. H. A, KLEIN, H, SCHEMPP, A, WEIS, T
Published in Journal of applied physics (01.12.1987)
Published in Journal of applied physics (01.12.1987)
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Charge and energy transfer in collisions of Cs+ ions with a cesiated W(110) surface
VAN AMERSFOORT, P. W, GEERLINGS, J. J. C, KWAKMAN, L. F. T, GRANNEMAN, E. H. A, LOS, J
Published in Journal of applied physics (01.01.1985)
Published in Journal of applied physics (01.01.1985)
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Bunching of intense, low-energy ion beams in a periodic focusing quadrupole channel
Ivanov, S.T., Siebenlist, F., Thomae, R.W., Granneman, E.H.A., Los, J., Van Amersfoort, P.W., Klein, H., Schempp, A., Weis, T.
Published in Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment (15.12.1987)
Published in Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment (15.12.1987)
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