Two- and three-dimensional microcoil fabrication process for three-axis magnetic sensors on flexible substrates
Woytasik, M., Grandchamp, J.-P., Dufour-Gergam, E., Gilles, J.-P., Megherbi, S., Martincic, E., Mathias, H., Crozat, P.
Published in Sensors and actuators. A. Physical. (08.11.2006)
Published in Sensors and actuators. A. Physical. (08.11.2006)
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Journal Article
Characterization of flexible RF microcoils dedicated to local MRI
WOYTASIK, M, GINEFRI, J.-C, DARRASSE, L, RAYNAUD, J.-S, POIRIER-QUINOT, M, DUFOUR-GERGAM, E, GRANDCHAMP, J.-P, GIRARD, O, ROBERT, P, GILLES, J.-P, MARTINCIC, E
Published in Microsystem technologies (01.07.2007)
Published in Microsystem technologies (01.07.2007)
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Conference Proceeding
Journal Article
Fabrication of planar and three-dimensional microcoils on flexible substrates
WOYTASIK, M, GRANDCHAMP, J.-P, DUFOUR-GERGAM, E, MARTINCIC, E, GILLES, J.-P, MEGHERBI, S, LAVALLEY, V, MATHET, V
Published in Microsystem technologies (01.09.2006)
Published in Microsystem technologies (01.09.2006)
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Conference Proceeding
Journal Article
Shape memory thin films with transition above room temperature from Ni-rich NiTi films
Frantz, N., Dufour-Gergam, E., Grandchamp, J.P., Bosseboeuf, A., Seiler, W., Nouet, G., Catillon, G.
Published in Sensors and actuators. A, Physical (30.04.2002)
Published in Sensors and actuators. A, Physical (30.04.2002)
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Journal Article
Conference Proceeding
Copper micromoulding process for NMR microinductors realization
Coutrot, A.-L, Dufour-Gergam, E, Quemper, J.-M, Martincic, E, Gilles, J.-P, Grandchamp, J.-P, Matlosz, M, Sanchez, A, Darasse, L, Ginefri, J.-C
Published in Sensors and actuators. A, Physical (30.04.2002)
Published in Sensors and actuators. A, Physical (30.04.2002)
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Journal Article
Conference Proceeding
Fabrication of a gray-tone mask and pattern transfer in thick photoresists
Nicolas, S, Dufour-Gergam, E, Bosseboeuf, A, Bourouina, T, Gilles, J-P, Grandchamp, J-P
Published in Journal of micromechanics and microengineering (01.06.1998)
Published in Journal of micromechanics and microengineering (01.06.1998)
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Journal Article
Conference Proceeding
Permalloy electroplating through photoresist molds
Quemper, Jean-Marie, Nicolas, S., Gilles, J.P., Grandchamp, J.P., Bosseboeuf, A., Bourouina, T., Dufour-Gergam, E.
Published in Sensors and actuators. A, Physical (20.04.1999)
Published in Sensors and actuators. A, Physical (20.04.1999)
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Journal Article
Conference Proceeding
RIBE of 10 μm thick aluminum films for microelectromechanical devices
SURBLED, P, DUFOUR-GERGAM, E, GILLES, J.-P, GRANDCHAMP, J.-P
Published in Journal of micromechanics and microengineering (01.09.1997)
Published in Journal of micromechanics and microengineering (01.09.1997)
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Conference Proceeding
Journal Article
Improvement of a classical electrodeposition process for electrostatic variable-capacitance, side-drive micromotor fabrication
Surbled, P, Dufour-Gergam, E, Bosseboeuf, A, Gilles, J-P, Grandchamp, J-P
Published in Journal of micromechanics and microengineering (01.03.1996)
Published in Journal of micromechanics and microengineering (01.03.1996)
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Journal Article
Conference Proceeding
Vacuum measurement in wafer level encapsulations by interference microscopy
BOSSEBOEUF, A, GRANDCHAMP, J. P, BRELUZEAU, C, LANI, S, PALOMO, J, BOUVILLE, D
Published in Microsystem technologies (01.09.2006)
Published in Microsystem technologies (01.09.2006)
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Conference Proceeding
Journal Article
Modeling micropumps with electrical equivalent networks
Bourouina, Tarik, Grandchamp, Jean-Paul
Published in Journal of micromechanics and microengineering (01.12.1996)
Published in Journal of micromechanics and microengineering (01.12.1996)
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Journal Article
Design and simulation of an electrostatic micropump for drug-delivery applications
Bourouina, Tarik, SRC, Grandchamp, Jean-Paul
Published in Journal of micromechanics and microengineering (01.09.1997)
Published in Journal of micromechanics and microengineering (01.09.1997)
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Journal Article
Conference Proceeding
Electron-and ion-assisted silicon surface chemistry in a DC-excited CHF3 plasma
Lejeune, C, Cardinaud, Ch, Collard, E, Grandchamp, J P, Turban, G
Published in Journal of physics. D, Applied physics (14.06.1991)
Published in Journal of physics. D, Applied physics (14.06.1991)
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Journal Article
Highly selective SiO2/Si reactive ion beam etching with low energy fluorocarbon ions
COLLARD, E, LEJEUNE, C, GRANDCHAMP, J. P, GILLES, J. P, SCHEIBLIN, P
Published in Thin solid films (01.12.1990)
Published in Thin solid films (01.12.1990)
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Conference Proceeding
Silicon damage and residue overlayer caused by rie and ribe processes with CHF3
Cardinaud, Ch, Turban, G., Grolleau, B., Grandchamp, J.P., Lejeune, C., Scheiblin, P., Collard, E.
Published in Applied surface science (01.01.1989)
Published in Applied surface science (01.01.1989)
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Journal Article
CF incorporated overlayer growth on silicon exposed to a d.c.-excited CF4 plasma
Lejeune, C, Collard, E, Grandchamp, J.P, Scheiblin, P, Gilles, J.P
Published in Thin solid films (15.12.1990)
Published in Thin solid films (15.12.1990)
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Journal Article
Highly decoupled single-crystal silicon resonators: an approach for the intrinsic quality factor
Le Foulgoc, Baptiste, Bourouina, Tarik, Le Traon, Olivier, Bosseboeuf, Alain, Marty, Frédéric, Breluzeau, Cédric, Grandchamp, Jean-Paul, Masson, Stève
Published in Journal of micromechanics and microengineering (01.06.2006)
Published in Journal of micromechanics and microengineering (01.06.2006)
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Journal Article
Conference Proceeding
Cryosonde IRM : antenne IRM supraconductrice pour la microscopie des régions superficielles du corps humain et des petits modèles animaux
Darrasse, L., Chiron, L., Ginefri, J.-C., Poirier-Quinot, M., Trollier, T., Ravex, A., Tanchon, J., Poncet, J.-M., Arnaud, J.-P., Gauthier, A., Guillemet, L., Crozat, P., Coutrot, A.-L., Dufour-Gergam, E., Gilles, J.-P., Grandchamp, J.-P., Woytasik, M., Martincic, E., Quemper, J.-M.
Published in Innovation et technologie en biologie et médecine, une revue de technologie biomédical (01.11.2004)
Published in Innovation et technologie en biologie et médecine, une revue de technologie biomédical (01.11.2004)
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