3 MODULAR SYSTEM LAYOUT UTI`LIZING THREE DIMENSIONS
SALEK MOHSEN, VAN GOGH JAMES STEPHEN, KRISTOFFERSEN CANDI, GOULD RICHARD HOWARD
Year of Publication 11.04.2017
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Year of Publication 11.04.2017
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EFEM EQUIPMENT FRONT END MODULE GAS RECIRCULATION
LOPES TODD ANTHONY, SENN BRANDON LEE, WONG SCOTT VERNON, AGUILAR AMAYA SILVIA ROCIO, WASSEI PETER R, GOULD RICHARD HOWARD, KELLER JAMES DONALD, PRACKO STEVEN EDMUND
Year of Publication 19.12.2018
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Year of Publication 19.12.2018
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WAFER TRANSFER MICROCLIMATE TECHNIQUES AND APPARATUSES INCLUDING HORIZONTAL SLOT IMPLEMENTATIONS AND/OR TRAVELLING SHOWERHEADS
SALEK MOHSEN, SENN BRANDON, WITKOWICKI DEREK JOHN, BLANK RICHARD M, QUILES EFRAIN, VAN GOGH JAMES STEPHEN, SINGH HARMEET, KRISTOFFERSEN CANDI, GOULD RICHARD HOWARD
Year of Publication 17.05.2017
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Year of Publication 17.05.2017
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Multi-station tool with wafer transfer microclimate systems
Salek, Mohsen, Quiles, Efrain, Gould, Richard Howard, Blank, Richard M
Year of Publication 24.12.2019
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Year of Publication 24.12.2019
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Buffer station with single exit-flow direction
Gould, Richard Howard, Maraschin, Martin Robert, Witkowicki, Derek John
Year of Publication 21.05.2019
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Year of Publication 21.05.2019
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BUFFER STATION WITH SINGLE EXIT-FLOW DIRECTION
Gould, Richard Howard, Maraschin, Martin Robert, Witkowicki, Derek John
Year of Publication 24.05.2018
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Year of Publication 24.05.2018
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MODULAR SYSTEM LAYOUT UTILIZING THREE-DIMENSIONS
van Gogh James Stephen, Gould Richard Howard, Salek Mohsen, Kristoffersen Candi
Year of Publication 30.03.2017
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Year of Publication 30.03.2017
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Buffer station with single exit-flow direction
GOULD, RICHARD HOWARD, WITKOWICKI, DEREK JOHN, MARASCHIN, MARTIN ROBERT
Year of Publication 11.01.2020
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Year of Publication 11.01.2020
Patent
WAFER TRANSFER MICROCLIMATE TECHNIQUES AND APPARATUSES, INCLUDING HORIZONTAL SLOT IMPLEMENTATIONS AND/OR TRAVELLING SHOWERHEADS
Blank Richard M, van Gogh James Stephen, Witkowicki Derek John, Gould Richard Howard, Quiles Efrain, Salek Mohsen, Senn Brandon, Kristoffersen Candi, Singh Harmeet
Year of Publication 04.05.2017
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Year of Publication 04.05.2017
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Buffer station with single exit-flow direction
GOULD, RICHARD HOWARD, WITKOWICKI, DEREK JOHN, MARASCHIN, MARTIN ROBERT
Year of Publication 01.08.2016
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Year of Publication 01.08.2016
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Modular system layout utilizing three dimensions
GOULD, RICHARD HOWARD, VAN GOGH, JAMES STEPHEN, KRISTOFFERSEN, CANDI, SALEK, MOHSEN
Year of Publication 01.08.2017
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Year of Publication 01.08.2017
Patent
Wafer transfer microclimate techniques and apparatuses, including horizontal slot implementations and/or travelling showerheads
QUILES, EFRAIN, WITKOWICKI, DEREK JOHN, GOULD, RICHARD HOWARD, VAN GOGH, JAMES STEPHEN, BLANK, RICHARD M, KRISTOFFERSEN, CANDI, SENN, BRANDON, SINGH, HARMEET, SALEK, MOHSEN
Year of Publication 18.08.2017
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Year of Publication 18.08.2017
Patent