Doppler-broadened line shapes of atomic hydrogen in a parallel-plate radio frequency discharge
CAPPELLI, A. L, GOTTSCHO, R. A, MILLER, T. A
Published in Plasma chemistry and plasma processing (01.12.1985)
Published in Plasma chemistry and plasma processing (01.12.1985)
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Journal Article
Theoretical electronic structure and perturbations in SiS
Robbe, J.M., Lefebvre-Brion, H., Gottscho, R.A.
Published in Journal of molecular spectroscopy (1981)
Published in Journal of molecular spectroscopy (1981)
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Journal Article
Real-time, In Situ Monitoring Of Semiconductor Processing
Gottscho, R.A., Aydil, E.S., Giapis, K.P., Gregus, J.A., Euijoun Youn, Hayes, T.R., Vernon, M.F., Chakrabarti, U.K.
Published in LEOS '92 Conference Proceedings (1992)
Published in LEOS '92 Conference Proceedings (1992)
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Conference Proceeding