Orientation- and concentration-dependent surfactant adsorption on silicon in aqueous alkaline solutions: explaining the changes in the etch rate, roughness and undercutting for MEMS applications
Gosálvez, M A, Tang, B, Pal, P, Sato, K, Kimura, Y, Ishibashi, K
Published in Journal of micromechanics and microengineering (01.12.2009)
Published in Journal of micromechanics and microengineering (01.12.2009)
Get full text
Journal Article
An atomistic introduction to anisotropic etching
Gosálvez, M A, Sato, K, Foster, A S, Nieminen, R M, Tanaka, H
Published in Journal of micromechanics and microengineering (01.04.2007)
Published in Journal of micromechanics and microengineering (01.04.2007)
Get full text
Journal Article
Conference Proceeding
Experimental procurement of the complete 3D etch rate distribution of Si in anisotropic etchants based on vertically micromachined wagon wheel samples
Gosálvez, M A, Pal, Prem, Ferrando, N, Hida, H, Sato, K
Published in Journal of micromechanics and microengineering (01.12.2011)
Published in Journal of micromechanics and microengineering (01.12.2011)
Get full text
Journal Article
Implementation and evaluation of the Level Set method: Towards efficient and accurate simulation of wet etching for microengineering applications
Montoliu, C., Ferrando, N., Gosálvez, M.A., Cerdá, J., Colom, R.J.
Published in Computer physics communications (01.10.2013)
Published in Computer physics communications (01.10.2013)
Get full text
Journal Article
Faster simulations of step bunching during anisotropic etching: formation of zigzag structures on Si(1 1 0)
Gosálvez, M A, Xing, Y, Hynninen, T, Uwaha, M, Foster, A S, Nieminen, R M, Sato, K
Published in Journal of micromechanics and microengineering (01.04.2007)
Published in Journal of micromechanics and microengineering (01.04.2007)
Get full text
Journal Article
Conference Proceeding
Etched profile control in anisotropic etching of silicon by TMAH+Triton
Pal, Prem, Gosálvez, M A, Sato, K
Published in Journal of micromechanics and microengineering (01.06.2012)
Published in Journal of micromechanics and microengineering (01.06.2012)
Get full text
Journal Article
Evolutionary continuous cellular automaton for the simulation of wet etching of quartz
Ferrando, N, Gosálvez, M A, Colóm, R J
Published in Journal of micromechanics and microengineering (01.02.2012)
Published in Journal of micromechanics and microengineering (01.02.2012)
Get full text
Journal Article
Evidence for faster etching at the mask-substrate interface: atomistic simulation of complex cavities at the micron-/submicron-scale by the continuous cellular automaton
Gosálvez, M A, Ferrando, N, Fedoryshyn, Y, Leuthold, J, McPeak, K M
Published in Journal of micromechanics and microengineering (01.04.2016)
Published in Journal of micromechanics and microengineering (01.04.2016)
Get full text
Journal Article
Atomistic methods for the simulation of evolving surfaces
Gosálvez, M A, Xing, Y, Sato, K, Nieminen, R M
Published in Journal of micromechanics and microengineering (01.05.2008)
Published in Journal of micromechanics and microengineering (01.05.2008)
Get full text
Journal Article