이온화 장치를 포함하는 질량 분석기
REUTER RUDIGER, LAUE ALEXANDER, FEDOSENKO GENNADY, GORKHOVER LEONID, CHUNG HIN YIU ANTHONY
Year of Publication 02.12.2021
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Year of Publication 02.12.2021
Patent
공정의 실시간 모니터링 방법 및 질량 분광계
DERPMANN VALERIE, REUTER RUDIGER, LAUE ALEXANDER, LUNDQUIST THEODORE, FEDOSENKO GENNADY, GORKHOVER LEONID, ANTONI MARTIN, CHUNG HIN YIU ANTHONY, ALIMAN MICHEL, GORUS ANDREAS
Year of Publication 21.10.2019
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Year of Publication 21.10.2019
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Very sensitive real-time inline process mass spectrometer based on FFT Ion Trap technique
Chung, Hin Yiu, Aliman, Michel, Fedosenko, Gennady, Laue, Alexander, Reuter, Rudiger, Derpmann, Valerie, Gorkhover, Leonid, Antoni, Martin
Published in 2016 27th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.05.2016)
Published in 2016 27th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.05.2016)
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Conference Proceeding
Journal Article
IONIZATION DEVICE AND MASS SPECTROMETER THEREWITH
REUTER RUDIGER, AWAKOWICZ PETER, LAUE ALEXANDER, WINTER JORG, FEDOSENKO GENNADY, GORKHOVER LEONID, KEUDELL ACHIM VON, BENTER THORSTEN, BOKE MARC, ALIMAN MICHEL, CHUNG HIN YIU ANTHONY
Year of Publication 29.08.2017
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Year of Publication 29.08.2017
Patent
APPARATUS AND METHOD FOR SURFACE PROCESSING OF A SUBSTRATE
RANCK ALBRECHT, FEDOSENKO GENNADY, GORKHOVER LEONID, CHUNG HIN YIU ANTHONY, ALIMAN MICHEL
Year of Publication 06.10.2014
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Year of Publication 06.10.2014
Patent
Mass spectrometer comprising an ionization device
Fedosenko, Gennady, Reuter, Rudiger, Chung, Hin Yiu Anthony, Gorkhover, Leonid, Laue, Alexander
Year of Publication 16.01.2024
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Year of Publication 16.01.2024
Patent
MASS SPECTROMETER COMPRISING AN IONIZATION DEVICE
Fedosenko, Gennady, Reuter, Rudiger, Chung, Hin Yiu Anthony, Gorkhover, Leonid, Laue, Alexander
Year of Publication 02.06.2022
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Year of Publication 02.06.2022
Patent
MASS SPECTROMETER COMPRISING AN IONIZATION DEVICE
LAUE, Alexander, GORKHOVER, Leonid, CHUNG, Hin Yiu Anthony, REUTER, Rüdiger, FEDOSENKO, Gennady
Year of Publication 09.02.2022
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Year of Publication 09.02.2022
Patent