Extending spatial-phase-locked electron-beam lithography to two dimensions
GOODBERLET, J. G, FERRERA, J, FARHOUD, M, CHAN, V. Z, SMITH, H. I
Published in Japanese Journal of Applied Physics (01.12.1997)
Published in Japanese Journal of Applied Physics (01.12.1997)
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Conference Proceeding
Journal Article
A very-high-density scintillation-data-storage device
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Journal Article
Conference Proceeding
Spatial-phase locking of energy beams for determining two-dimensional location and beam shape
Hastings, Jeffrey T, Goodberlet, James G, Zhang, Feng, Smith, Henry I
Year of Publication 26.08.2008
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Year of Publication 26.08.2008
Patent
SPATIAL-PHASE LOCKING OF ENERGY BEAMS FOR DETERMINING TWO-DIMENSIONAL LOCATION AND BEAM SHAPE
ZHANG, FENG, SMITH, HENRY, I, HASTINGS, JEFFREY, T, GOODBERLET, JAMES, G
Year of Publication 06.04.2006
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Year of Publication 06.04.2006
Patent
METHOD FOR FABRICATION OF DIFFRACTIVE OPTICAL ELEMENTS FOR MASKLESS LITHOGRAPHY
SMITH, HENRY, I, HASTINGS, JEFFREY, T, GOODBERLET, JAMES, G, GIL, DARIO, MENON, RAJESH, CARTER, DAVID, J
Year of Publication 23.12.2004
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Year of Publication 23.12.2004
Patent