Diamond-like carbon applications in high density hard disc recording heads
Goglia, Peter R., Berkowitz, Jeffrey, Hoehn, Joel, Xidis, Anthony, Stover, Lance
Published in Diamond and related materials (01.02.2001)
Published in Diamond and related materials (01.02.2001)
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Journal Article
Advanced techniques for enhanced Ion Beam Etch uniformity
Goglia, Peter, Hegde, Hari, Pilloux, Yannick
Published in 2018 China Semiconductor Technology International Conference (CSTIC) (01.03.2018)
Published in 2018 China Semiconductor Technology International Conference (CSTIC) (01.03.2018)
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Conference Proceeding