Fabrication and Preliminary Results for LiGA Fabricated Nickel Micro Gas Chromatograph Columns
Bhushan, A., Yemane, D., Overton, E.B., Goettert, J., Murphy, M.C.
Published in Journal of microelectromechanical systems (01.04.2007)
Published in Journal of microelectromechanical systems (01.04.2007)
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Journal Article
Measured mechanical properties of LIGA Ni structures
Cho, H.S., Hemker, K.J., Lian, K., Goettert, J., Dirras, G.
Published in Sensors and actuators. A, Physical (15.01.2003)
Published in Sensors and actuators. A, Physical (15.01.2003)
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Journal Article
Conference Proceeding
Direct LIGA service for prototyping : status report
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Conference Proceeding
Journal Article
CMOS compatible integration of three-dimensional microfluidic systems based on low-temperature transfer of SU-8 films
Zheng-chun Peng, Zhong-geng Ling, Tondra, M., Chang-geng Liu, Min Zhang, Kun Lian, Goettert, J., Hormes, J.
Published in Journal of microelectromechanical systems (01.06.2006)
Published in Journal of microelectromechanical systems (01.06.2006)
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Journal Article
Fabrication of ceramic microcomponents using deep X-ray lithography
MÜLLER, C, HANEMANN, T, WICHE, G, KUMAR, C, GOETTERT, J
Published in Microsystem technologies (01.04.2005)
Published in Microsystem technologies (01.04.2005)
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Conference Proceeding
Journal Article
A Micro corona motor fabricated by a SU-8 built-on X-ray mask
LEE, S, KIM, D, JIN, Y, HAN, Y, DESTA, Y, BRYANT, M. D, GOETTERT, J
Published in Microsystem technologies : sensors, actuators, systems integration (01.10.2004)
Published in Microsystem technologies : sensors, actuators, systems integration (01.10.2004)
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Journal Article
Micro gas bearings fabricated by deep X-ray lithography
KIM, D, LEE, S, JIN, Y, DESTA, Y, BRYANT, M. D, GOETTERT, J
Published in Microsystem technologies : sensors, actuators, systems integration (01.10.2004)
Published in Microsystem technologies : sensors, actuators, systems integration (01.10.2004)
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Journal Article
Precision of micromilled x-ray masks and exposures
FRIEDRICH, C, COANE, P, GOETTERT, J, GOPINATHIN, N
Published in Microsystem technologies : sensors, actuators, systems integration (12.12.1997)
Published in Microsystem technologies : sensors, actuators, systems integration (12.12.1997)
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Journal Article
Fabrication of a cyclic olefin copolymer planar waveguide embedded in a multi-channel poly(methyl methacrylate) fluidic chip for evanescence excitation
Okagbare, Paul I, Emory, Jason M, Datta, Proyag, Goettert, Jost, Soper, Steven A
Published in Lab on a chip (07.01.2010)
Published in Lab on a chip (07.01.2010)
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Journal Article
Microfluidic devices fabricated in poly(methyl methacrylate) using hot-embossing with integrated sampling capillary and fiber optics for fluorescence detection
Qi, Shize, Liu, Xuezhu, Ford, Sean, Barrows, James, Thomas, Gloria, Kelly, Kevin, McCandless, Andrew, Lian, Kun, Goettert, Jost, Soper, Steven A
Published in Lab on a chip (01.05.2002)
Published in Lab on a chip (01.05.2002)
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Journal Article
Hybrid integration of injector and detector functions for microchip gas chromatography
Bhushan, Abhinav, Yemane, Dawit, McDaniel, Scott, Goettert, Jost, Murphy, Michael C, Overton, Edward B
Published in Analyst (London) (01.10.2010)
Published in Analyst (London) (01.10.2010)
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Journal Article
Tensile, creep and fatigue properties of LIGA nickel structures
Cho, H.S., Hemker, K.J., Lian, K., Goettert, J.
Published in Proceedings, IEEE micro electro mechanical systems (2002)
Published in Proceedings, IEEE micro electro mechanical systems (2002)
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Conference Proceeding
Fabrication of ultra thick, ultra high aspect ratio microcomponents by deep and ultra deep X-ray lithography
Jian, L., Loechel, B., Scheunemann, H.-U., Bednarzik, M., Desta, Y.M., Goettert, J.
Published in Proceedings International Conference on MEMS, NANO and Smart Systems (2003)
Published in Proceedings International Conference on MEMS, NANO and Smart Systems (2003)
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Conference Proceeding
Fluid-structure coupling analysis and simulation of a micromachined piezo microjet
Changgeng Liu, Tianhong Cui, Zhaoying Zhou, Kun Lian, Goettert, J.
Published in TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) (2003)
Published in TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) (2003)
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Conference Proceeding
Fluid–structure coupling analysis and simulation of a micromachined piezo microjet
Liu, Changgeng, Cui, Tianhong, Zhou, Zhaoying, Lian, Kun, Goettert, Jost
Published in Sensors and actuators. A. Physical. (01.09.2004)
Published in Sensors and actuators. A. Physical. (01.09.2004)
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