Optimizing the parameter space for increased crystallinity of silicon nanoparticles grown in the gas phase
Mohan, Akshatha, Schropp, Ruud E. I., Poulios, Ioannis, Goedheer, Wim J., Rath, Jatin K.
Published in Physica status solidi. A, Applications and materials science (01.07.2016)
Published in Physica status solidi. A, Applications and materials science (01.07.2016)
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Journal Article
Ion bombardment measurements and simulations of a low temperature VHF PECVD SiH4-H2 discharge in the a-Si:H to µc-Si:H transition regime
Landheer, Kees, Goedheer, Wim J, Poulios, Ioannis, Schropp, Ruud E I, Rath, Jatindra K
Published in Physica status solidi. A, Applications and materials science (01.07.2016)
Published in Physica status solidi. A, Applications and materials science (01.07.2016)
Get full text
Journal Article
Ion bombardment measurements and simulations of a low temperature VHF PECVD SiH sub(4)-H sub(2) discharge in the a-Si:H to mu c-Si:H transition regime
Landheer, Kees, Goedheer, Wim J, Poulios, Ioannis, Schropp, Ruud EI, Rath, Jatindra K
Published in Physica status solidi. A, Applications and materials science (01.07.2016)
Published in Physica status solidi. A, Applications and materials science (01.07.2016)
Get full text
Journal Article
Ion bombardment measurements and simulations of a low temperature VHF PECVD SiH 4 –H 2 discharge in the a‐Si:H to μc‐Si:H transition regime
Landheer, Kees, Goedheer, Wim J., Poulios, Ioannis, Schropp, Ruud E. I., Rath, Jatindra K.
Published in Physica status solidi. A, Applications and materials science (01.07.2016)
Published in Physica status solidi. A, Applications and materials science (01.07.2016)
Get full text
Journal Article
Ion bombardment measurements and simulations of a low temperature VHF PECVD SiH4-H2 discharge in the a-Si:H to μc-Si:H transition regime
Landheer, Kees, Goedheer, Wim J., Poulios, Ioannis, Schropp, Ruud E. I., Rath, Jatindra K.
Published in Physica status solidi. A, Applications and materials science (01.07.2016)
Published in Physica status solidi. A, Applications and materials science (01.07.2016)
Get full text
Journal Article
Optimizing the parameter space for increased crystallinity of silicon nanoparticles grown in the gas phase (Phys. Status Solidi A 7∕2016)
Mohan, Akshatha, Schropp, Ruud E. I., Poulios, Ioannis, Goedheer, Wim J., Rath, Jatin K.
Published in Physica status solidi. A, Applications and materials science (01.07.2016)
Published in Physica status solidi. A, Applications and materials science (01.07.2016)
Get full text
Journal Article