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Year of Publication 20.11.2020
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CHEMICAL DELIVERY CHAMBER FOR SELF-ASSEMBLED MONOLAYER PROCESSES
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Year of Publication 18.09.2020
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Year of Publication 28.07.2021
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광학 디바이스 제작을 위한 전자 빔 장치
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Year of Publication 28.07.2021
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Year of Publication 28.07.2021
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Year of Publication 28.07.2021
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Year of Publication 28.07.2021
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Year of Publication 19.10.2020
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Year of Publication 19.10.2020
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증착, 주입, 및 처리를 위한, 다수의 반응 가스들, 높은 바이어스 전력, 및 높은 전력 임펄스 공급원을 갖는 PVD 챔버의 확장
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Year of Publication 02.09.2019
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Ion energy distributions measured inside a high-voltage cathode in a BF3 pulsed dc plasma used for plasma doping: experiments and ab initio calculations
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Published in Plasma sources science & technology (01.12.2012)
Published in Plasma sources science & technology (01.12.2012)
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자기-조립 단분자층 프로세스들을 위한 화학물질 전달 챔버
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Year of Publication 03.12.2018
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Year of Publication 03.12.2018
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고 종횡비 구조들에서의 갭충전을 위한 방법들
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Year of Publication 29.10.2018
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Year of Publication 29.10.2018
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Ion energy distributions measured inside a high-voltage cathode in a BF 3 pulsed dc plasma used for plasma doping: experiments and ab initio calculations
Godet, Ludovic, Radovanov, Svetlana, Sheuer, Jay, Cardinaud, Christophe, Fernandez, Nicolas, Ferro, Yves, Cartry, Gilles
Published in Plasma sources science & technology (01.12.2012)
Published in Plasma sources science & technology (01.12.2012)
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Journal Article