A system to optimize inline defect detection using short loop testchips leading to faster yield learning
Tanya Yang, Hun Chow Lee, Lim, V., Gn, F. H., Mardiyono, T., Qionghan Wang, Long Phan Nguyen, Fei Li, Sa Zhao, Inani, A.
Published in 2011 IEEE/SEMI Advanced Semiconductor Manufacturing Conference (01.05.2011)
Published in 2011 IEEE/SEMI Advanced Semiconductor Manufacturing Conference (01.05.2011)
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Conference Proceeding
Fluorine effects on silicidation of BF2+-Implanted narrow poly lines
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Conference Proceeding
Application of conductive atomic force microscopy to study the in-line electrical defects
Toh, S.L., Deng, Q., Tang, W.T., Lim, V., Gn, F.H., Tan, P.K., Tan, H., Mai, Z.H., Lam, J.
Published in 2008 15th International Symposium on the Physical and Failure Analysis of Integrated Circuits (01.07.2008)
Published in 2008 15th International Symposium on the Physical and Failure Analysis of Integrated Circuits (01.07.2008)
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Conference Proceeding
Suppression of metal contamination by gettering
Teo, J.W.Y., Lim, H.W., Jin, Y., Huang, J.H., Chew, W.C., Leong, C.K., Gn, F.H., Li, M.F., Su, G.
Published in Proceedings of the 2001 8th International Symposium on the Physical and Failure Analysis of Integrated Circuits. IPFA 2001 (Cat. No.01TH8548) (2001)
Published in Proceedings of the 2001 8th International Symposium on the Physical and Failure Analysis of Integrated Circuits. IPFA 2001 (Cat. No.01TH8548) (2001)
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