Novel Method of Improving Electrical Properties of Thin PECVD Oxide Films by Fluorination of Silicon Surface Region by RIE in RF CF4 Plasma
Kalisz, Małgorzata, Głuszko, Grzegorz, Beck, Romuald B.
Published in Journal of Telecommunications and Information Technology (01.06.2023)
Published in Journal of Telecommunications and Information Technology (01.06.2023)
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Journal Article
The Effect of High Temperature Annealing on Fluorine Distribution Profile and Electro-Physical Properties of Thin Gate Oxide Fluorinated by Silicon Dioxide RIE in CF4 Plasma
Kalisz, Małgorzata, Głuszko, Grzegorz, Beck, Romuald B.
Published in Journal of Telecommunications and Information Technology (01.06.2023)
Published in Journal of Telecommunications and Information Technology (01.06.2023)
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Journal Article
Charge-pumping characterization of FILOX vertical MOSFETs
Głuszko, Grzegorz, Łukasiak, Lidia, Gili, Enrico, Ashburn, Peter
Published in Journal of Telecommunications and Information Technology (01.06.2023)
Published in Journal of Telecommunications and Information Technology (01.06.2023)
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Journal Article
Characterization of SOI MOSFETs by means of charge-pumping
Głuszko, Grzegorz, Szostak, Sławomir, Gottlob, Heinrich, Lemme, Max, Łukasiak, Lidia
Published in Journal of Telecommunications and Information Technology (01.06.2023)
Published in Journal of Telecommunications and Information Technology (01.06.2023)
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Journal Article
Elimination of the channel current effect on the characterization of MOSFET threshold voltage using junction capacitance measurements
Tomaszewski, Daniel, Głuszko, Grzegorz, Łukasiak, Lidia, Kucharski, Krzysztof, Malesińska, Jolanta
Published in Solid-state electronics (01.02.2017)
Published in Solid-state electronics (01.02.2017)
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Journal Article
Applying shallow nitrogen implantation from rf plasma for dual gate oxide technology
Bieniek, Tomasz, B. Beck, Romuald, Jakubowski, Andrzej, Głuszko, Grzegorz, Konarski, Piotr, Ćwil, Michał
Published in Journal of Telecommunications and Information Technology (01.06.2023)
Published in Journal of Telecommunications and Information Technology (01.06.2023)
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Journal Article
Field effect transistor with thin AlOxNy film as gate dielectric
Firek, Piotr, Szarafiński, Jakub, Głuszko, Grzegorz, Szmidt, Jan
Published in Microelectronics international (21.05.2020)
Published in Microelectronics international (21.05.2020)
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Journal Article
Charge-pumping characterization of SOI devices fabricated by means of wafer bonding over pre-patterned cavities
Głuszko, Grzegorz, Łukasiak, Lidia, Kilchytska, Valeriya, Ming Chung, Tsung, Olbrechts, Benoit, Flandre, Denis, Raskin, Jean-Pierre
Published in Journal of Telecommunications and Information Technology (01.06.2023)
Published in Journal of Telecommunications and Information Technology (01.06.2023)
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Journal Article
The influence of annealing (900◦C) of ultra-thin PECVD silicon oxynitride layers
Mroczyński, Robert, Głuszko, Grzegorz, B. Beck, Romuald, Jakubowski, Andrzej, Ćwil, Michał, Konarski, Piotr, Hoffmann, Patrick, Schmeißer, Dieter
Published in Journal of Telecommunications and Information Technology (01.06.2023)
Published in Journal of Telecommunications and Information Technology (01.06.2023)
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Journal Article
Studies of the quality of GdSiO–Si interface
Iwanowicz, Marcin, Jasiński, Jakub, Głuszko, Grzegorz, Łukasiak, Lidia, Jakubowski, Andrzej, Gottlob, Heinrich, Schmidt, Mathias
Published in Microelectronics and reliability (01.07.2011)
Published in Microelectronics and reliability (01.07.2011)
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Journal Article
Conference Proceeding
A simple method for characterization of MOSFET serial resistance asymmetry
Tomaszewski, Daniel, Gluszko, Grzegorz, Malesinska, Jolanta, Domanski, Krzysztof, Zaborowski, Michal, Kucharski, Krzysztof, Szmigiel, Dariusz, Sierakowski, Andrzej
Published in Proceedings of the 2015 International Conference on Microelectronic Test Structures (01.03.2015)
Published in Proceedings of the 2015 International Conference on Microelectronic Test Structures (01.03.2015)
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Conference Proceeding
Journal Article
FOSS EKV2.6 Verilog-A Compact MOSFET Model
Grabinski, Wladek, Abo-Elhadid, Ahmed, Mierzwinski, Marek, Lemaitre, Laurent, Brinson, Mike, Lallement, Christophe, Sallese, Jean-Michel, Yoshitomi, Sadayuki, Malisse, Paul, Oguey, Henri, Cserveny, Stefan, Pavanello, Marcelo, Enz, Christian, Krummenacher, Francois, Vittoz, Eric, Souza, Michelly de, Tomaszewski, Daniel, Malesinska, Jola, Gluszko, Grzegorz, Bucher, Matthias, Makris, Nikolaos, Nikolaou, Aristeidis
Published in ESSDERC 2019 - 49th European Solid-State Device Research Conference (ESSDERC) (01.09.2019)
Published in ESSDERC 2019 - 49th European Solid-State Device Research Conference (ESSDERC) (01.09.2019)
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Conference Proceeding
Electrical characterization of different types of transistors fabricated in VeSTIC process
Gluszko, Grzegorz, Tomaszewski, Daniel, Domanski, Krzysztof
Published in 2017 MIXDES - 24th International Conference "Mixed Design of Integrated Circuits and Systems (01.06.2017)
Published in 2017 MIXDES - 24th International Conference "Mixed Design of Integrated Circuits and Systems (01.06.2017)
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Conference Proceeding
MOSFETs in the VeSTIC process - fabrication and characterization
Tomaszewski, Daniel, Domanski, Krzysztof, Gluszko, Grzegorz, Sierakowski, Andrzej, Szmigiel, Dariusz
Published in 2017 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EUROSOI-ULIS) (01.04.2017)
Published in 2017 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EUROSOI-ULIS) (01.04.2017)
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Conference Proceeding
FDSOI MOSFET threshold voltage characterization based on AC simulation and measurements
Tomaszewski, Daniel, Gluszko, Grzegorz, Kucharski, Krzysztof, Malesinska, Jolanta, Lukasiak, Lidia
Published in 2017 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EUROSOI-ULIS) (01.04.2017)
Published in 2017 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EUROSOI-ULIS) (01.04.2017)
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Conference Proceeding
Characterization of gate overlap capacitances and effective channel size in MOSFETs
Tomaszewski, Daniel, Gluszko, Grzegorz, Malesmska, Jolanta
Published in 2018 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EUROSOI-ULIS) (01.03.2018)
Published in 2018 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EUROSOI-ULIS) (01.03.2018)
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Conference Proceeding
Current vs Substrate Bias Characteristics of MOSFETs as a Tool for Parameter Extraction
Tomaszewski, Daniel, Malesinska, Jolanta, Gluszko, Grzegorz, Kucharski, Krzysztof
Published in 2019 MIXDES - 26th International Conference "Mixed Design of Integrated Circuits and Systems" (01.06.2019)
Published in 2019 MIXDES - 26th International Conference "Mixed Design of Integrated Circuits and Systems" (01.06.2019)
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Conference Proceeding
An Effect of Device Topology in VeSTIC Process on Logic Circuit Operation A Study Based on Ring Oscillator Operation Analysis
Tomaszewski, Daniel, Domanski, Krzysztof, Gluszko, Grzegorz, Sierakowski, Andrzej, Szmigiel, Dariusz
Published in 2018 25th International Conference "Mixed Design of Integrated Circuits and System" (MIXDES) (01.06.2018)
Published in 2018 25th International Conference "Mixed Design of Integrated Circuits and System" (MIXDES) (01.06.2018)
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Conference Proceeding
A method for combined characterization of MOSFET threshold voltage and junction capacitance eliminating channel current effect
Tomaszewski, Daniel, Gluszko, Grzegorz, Malesinska, Jolanta
Published in 2016 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EUROSOI-ULIS) (01.01.2016)
Published in 2016 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EUROSOI-ULIS) (01.01.2016)
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Conference Proceeding