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ABRAMENKO DMITRIY BORISOVICH, GAYASOV ROBERT RAFILEVICH, KRIVTSUN VLADIMIR MIKHAILOVICH, GLUSHKOV DENIS ALEKSANDROVICH, LASH ALEKSANDR ANDREEVICH
Year of Publication 27.05.2024
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Year of Publication 27.05.2024
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EUV 방사선을 생성하기 위한 타겟 재료, 고휘도 EUV 소스 및 방법
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Year of Publication 05.08.2024
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Year of Publication 05.08.2024
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고휘도 레이저 생성 플라즈마 소스 및 방사선 생성 및 수집 방법
ELLWI SAMIR, KOSHELEV KONSTANTIN NIKOLAEVICH, VINOKHODOV ALEKSANDR YURIEVICH, IVANOV VLADIMIR VITALIEVICH, KHRISTOFOROV OLEG BORISOVICH, MEDVEDEV VYACHESLAV VALERIEVICH, KRIVTSUN VLADIMIR MIKHAILOVICH, GLUSHKOV DENIS ALEKSANDROVICH, KRIVOKORYTOV MIKHAIL SERGEYEVICH, LASH ALEKSANDR ANDREEVICH
Year of Publication 19.06.2024
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Year of Publication 19.06.2024
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다중 섹션 컬렉터 모듈을 구비한 단파장 방사선 소스
ELLWI SAMIR, KOSHELEV KONSTANTIN NIKOLAEVICH, VINOKHODOV ALEKSANDR YURIEVICH, IVANOV VLADIMIR VITALIEVICH, MEDVEDEV VYACHESLAV VALERIEVICH, KHRISTOFOROV OLEG BORISOVICH, KRIVTSUN VLADIMIR MIKHAILOVICH, GLUSHKOV DENIS ALEKSANDROVICH, KRIVOKORYTOV MIKHAIL SERGEYEVICH, SIDELNIKOV YURY VIKTOROVICH, YAKUSHEV OLEG FELIKSOVICH, LASH ALEKSANDR ANDREEVICH
Year of Publication 11.07.2023
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Year of Publication 11.07.2023
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HIGH-BRIGHTNESS LASER-PUMPED PLASMA LIGHT SOURCE AND METHOD FOR REDUCING ABERRATIONS
GAYASOV, Robert Rafilevich, GLUSHKOV, Denis Aleksandrovich, LASH, Aleksandr Andreevich, ABRAMENKO, Dmitry, Borisovich, KIRYUKHIN, Yurii Borisovich, KRIVTSUN, Vladimir Mikhailovich
Year of Publication 14.06.2023
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Year of Publication 14.06.2023
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HIGH-BRIGHTNESS LASER PRODUCED PLASMA SOURCE AND METHOD OF GENERATING AND COLLECTING RADIATION
GLUSHKOV, Denis Aleksandrovich, KHRISTOFOROV, Oleg Borisovich, MEDVEDEV, Vyacheslav Valerievich, IVANOV, Vladimir Vitalievich, VINOKHODOV, Aleksandr Yurievich, LASH, Aleksandr Andreevich, KRIVOKORYTOV, Mikhail Sergeyevich, ELLWI, Samir, KOSHELEV, Konstantin Nikolaevich, KRIVTSUN, Vladimir Mikhailovich
Year of Publication 11.09.2024
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Year of Publication 11.09.2024
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SHORT- WAVELENGTH RADIATION SOURCE WITH MULTISECTIONAL COLLECTOR MODULE
GLUSHKOV, Denis Aleksandrovich, SIDELNIKOV, Yury Viktorovich, KHRISTOFOROV, Oleg Borisovich, MEDVEDEV, Vyacheslav Valerievich, YAKUSHEV, Oleg Feliksovich, VINOKHODOV, Aleksandr Yurievich, IVANOV, Vladimir Vitalievich, LASH, Aleksandr Andreevich, KRIVOKORYTOV, Mikhail Sergeyevich, ELLWI, Samir, KOSHELEV, Konstantin Nikolaevich, KRIVTSUN, Vladimir Mikhailovich
Year of Publication 28.08.2024
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Year of Publication 28.08.2024
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High-brightness laser produced plasma source and method of generation and collection radiation
Khristoforov, Oleg Borisovich, Glushkov, Denis Aleksandrovich, Koshelev, Konstantin Nikolaevich, Ellwi, Samir, Ivanov, Vladimir Vitalievich, Medvedev, Vyacheslav Valerievich, Vinokhodov, Aleksandr Yurievich, Krivtsun, Vladimir Mikhailovich, Krivokorytov, Mikhail Sergeyevich, Lash, Aleksandr Andreevich
Year of Publication 02.07.2024
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Year of Publication 02.07.2024
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TARGET MATERIAL, HIGH-BRIGHTNESS EUV SOURCE AND METHOD FOR GENERATING EUV RADIATION
ASTAKHOV, Dmitrii Igorevich, GLUSHKOV, Denis Aleksandrovich, KHRISTOFOROV, Oleg Borisovich, MEDVEDEV, Vyacheslav Valerievich, IVANOV, Vladimir Vitalievich, VINOKHODOV, Aleksandr Yurievich, LASH, Aleksandr Andreevich, KRIVOKORYTOV, Mikhail Sergeyevich, ELLWI, Samir, KOSHELEV, Konstantin Nikolaevich, KRIVTSUN, Vladimir Mikhailovich
Year of Publication 20.07.2023
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Year of Publication 20.07.2023
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SHORT- WAVELENGTH RADIATION SOURCE WITH MULTISECTIONAL COLLECTOR MODULE
GLUSHKOV, Denis Aleksandrovich, SIDELNIKOV, Yury Viktorovich, KHRISTOFOROV, Oleg Borisovich, MEDVEDEV, Vyacheslav Valerievich, YAKUSHEV, Oleg Feliksovich, VINOKHODOV, Aleksandr Yurievich, IVANOV, Vladimir Vitalievich, LASH, Aleksandr Andreevich, KRIVOKORYTOV, Mikhail Sergeyevich, ELLWI, Samir, KOSHELEV, Konstantin Nikolaevich, KRIVTSUN, Vladimir Mikhailovich
Year of Publication 12.07.2023
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Year of Publication 12.07.2023
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HIGH-BRIGHTNESS LASER PRODUCED PLASMA SOURCE AND METHOD OF GENERATING AND COLLECTING RADIATION
GLUSHKOV, Denis Aleksandrovich, KHRISTOFOROV, Oleg Borisovich, MEDVEDEV, Vyacheslav Valerievich, IVANOV, Vladimir Vitalievich, VINOKHODOV, Aleksandr Yurievich, LASH, Aleksandr Andreevich, KRIVOKORYTOV, Mikhail Sergeyevich, ELLWI, Samir, KOSHELEV, Konstantin Nikolaevich, KRIVTSUN, Vladimir Mikhailovich
Year of Publication 11.05.2023
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Year of Publication 11.05.2023
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HIGH-BRIGHTNESS LASER PRODUCED PLASMA SOURCE AND METHOD OF GENERATION AND COLLECTION RADIATION
GLUSHKOV, Denis Aleksandrovich, KHRISTOFOROV, Oleg Borisovich, MEDVEDEV, Vyacheslav Valerievich, IVANOV, Vladimir Vitalievich, VINOKHODOV, Aleksandr Yurievich, LASH, Aleksandr Andreevich, KRIVOKORYTOV, Mikhail Sergeyevich, ELLWI, Samir, KOSHELEV, Konstantin Nikolaevich, KRIVTSUN, Vladimir Mikhailovich
Year of Publication 28.04.2022
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Year of Publication 28.04.2022
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SHORT- WAVELENGTH RADIATION SOURCE WITH MULTISECTIONAL COLLECTOR MODULE
GLUSHKOV, Denis Aleksandrovich, SIDELNIKOV, Yury Viktorovich, KHRISTOFOROV, Oleg Borisovich, MEDVEDEV, Vyacheslav Valerievich, YAKUSHEV, Oleg Feliksovich, VINOKHODOV, Aleksandr Yurievich, IVANOV, Vladimir Vitalievich, LASH, Aleksandr Andreevich, KRIVOKORYTOV, Mikhail Sergeyevich, ELLWI, Samir, KOSHELEV, Konstantin Nikolaevich, KRIVTSUN, Vladimir Mikhailovich
Year of Publication 10.03.2022
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Year of Publication 10.03.2022
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SHORT-WAVELENGTH RADIATION SOURCE WITH MULTISECTIONAL COLLECTOR MODULE AND METHOD OF COLLECTING RADIATION
GLUSHKOV, Denis Aleksandrovich, SIDELNIKOV, Yury Viktorovich, KHRISTOFOROV, Oleg Borisovich, MEDVEDEV, Vyacheslav Valerievich, YAKUSHEV, Oleg Feliksovich, IVANOV, Vladimir Vitalievich, VINOKHODOV, Aleksandr Yurievich, LASH, Aleksandr Andreevich, KRIVOKORYTOV, Mikhail Sergeyevich, KOSHELEV, Konstantin Nikolaevich, KRIVTSUN, Vladimir Mikhailovich, ELLWI, Samir
Year of Publication 25.03.2021
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Year of Publication 25.03.2021
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High brightness laser-produced plasma light source
Khristoforov, Oleg Borisovich, Koshelev, Konstantin Nikolaevich, Glushkov, Denis Aleksandrovich, Ellwi, Samir, Ivanov, Vladimir Vitalievich, Vinokhodov, Aleksandr Yurievich, Medvedev, Vyacheslav Valerievich, Sidelnikov, Yury Viktorovich, Krivtsun, Vladimir Mikhailovich, Yakushev, Oleg Feliksovich, Krivokorytov, Mikhail Sergeyevich, Lash, Aleksandr Andreevich
Year of Publication 05.01.2021
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Year of Publication 05.01.2021
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HIGH BRIGHTNESS LASER-PRODUCED PLASMA LIGHT SOURCE
GLUSHKOV, Denis Aleksandrovich, SIDELNIKOV, Yury Viktorovich, KHRISTOFOROV, Oleg Borisovich, MEDVEDEV, Vyacheslav Valerievich, YAKUSHEV, Oleg Feliksovich, IVANOV, Vladimir Vitalievich, VINOKHODOV, Aleksandr Yurievich, LASH, Aleksandr Andreevich, KRIVOKORYTOV, Mikhail Sergeyevich, KOSHELEV, Konstantin Nikolaevich, KRIVTSUN, Vladimir Mikhailovich, ELLWI, Samir
Year of Publication 21.05.2020
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Year of Publication 21.05.2020
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High brightness short-wavelength radiation source (variants)
Khristoforov, Oleg Borisovich, Koshelev, Konstantin Nikolaevich, Glushkov, Denis Aleksandrovich, Ellwi, Samir, Vinokhodov, Aleksandr Yurievich, Ivanov, Vladimir Vitalievich, Medvedev, Vyacheslav Valerievich, Sidelnikov, Yury Viktorovich, Krivtsun, Vladimir Mikhailovich, Yakushev, Oleg Feliksovich, Krivokorytov, Mikhail Sergeyevich, Lash, Aleksandr Andreevich
Year of Publication 10.03.2020
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Year of Publication 10.03.2020
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