Pulse Magnetron Sputtering with high power density – an attempt at a critical evaluation
Frach, Peter, Gottfried, Christian, Fietzke, Fred, Klostermann, Heidrun, Bartzsch, Hagen, Glöß, Daniel
Published in IOP conference series. Materials Science and Engineering (11.09.2012)
Published in IOP conference series. Materials Science and Engineering (11.09.2012)
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Journal Article
Effect of process parameters on structure and piezoelectric properties of AlN and AlXSc1−XN films deposited by pulsed magnetron sputtering
Barth, Stephan, Bartzsch, Hagen, Gloss, Daniel, Frach, Peter, Zywitzki, Olaf, Herzog, Thomas, Walter, Susan, Heuer, Henning
Published in 2014 IEEE International Ultrasonics Symposium (01.09.2014)
Published in 2014 IEEE International Ultrasonics Symposium (01.09.2014)
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Conference Proceeding
Electrical insulation properties of sputter-deposited SiO2, Si3N4 and Al2O3 films at room temperature and 400 °C
Bartzsch, Hagen, Glöß, Daniel, Frach, Peter, Gittner, Matthias, Schultheiß, Eberhard, Brode, Wolfgang, Hartung, Johannes
Published in Physica status solidi. A, Applications and materials science (01.03.2009)
Published in Physica status solidi. A, Applications and materials science (01.03.2009)
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Journal Article
Magnetron sputtering of piezoelectric AlN and AlScN thin films and their use in energy harvesting applications
Barth, Stephan, Bartzsch, Hagen, Glöß, Daniel, Frach, Peter, Modes, Thomas, Zywitzki, Olaf, Suchaneck, Gunnar, Gerlach, Gerald
Published in Microsystem technologies : sensors, actuators, systems integration (01.07.2016)
Published in Microsystem technologies : sensors, actuators, systems integration (01.07.2016)
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Journal Article
METHOD FOR ACTIVATING A PHOTOCATALYTICALLY ACTIVE OUTER LAYER DEPOSITED ON A COMPOSITE
Gotzmann, Gaby, Wartenberg, Philipp, Gloss, Daniel, Vogel, Uwe, Schonfelder, Jessy
Year of Publication 23.09.2021
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Year of Publication 23.09.2021
Patent
Physico-chemical and microbiological effects of photocatalytic titanium oxide layers
Frach, Peter, Gloss, Daniel, Vergohl, Michael, Hund-Rinke, Kerstin, Trick, Iris
Published in Vakuum in Forschung und Praxis : Zeitschrift für Vakuumtechnologie, Oberflèachen und Dünne Schichten (01.12.2007)
Published in Vakuum in Forschung und Praxis : Zeitschrift für Vakuumtechnologie, Oberflèachen und Dünne Schichten (01.12.2007)
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Journal Article
Thermal energy storage assembly
LINDQUIST, Torbjörn, OLAUSSON, Martin, GUSTAFSSON, Dan, HAGSTEDT, Rustan, KJELLIN, Karin, GLOSS, Daniel
Year of Publication 30.04.2020
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Year of Publication 30.04.2020
Patent