A study of mixtures of HfO2 and TiO2 as high-k gate dielectrics
CHEN, F, BIN, X, HELLA, C, SHI, X, GLADFELTER, W. L, CAMPBELL, S. A
Published in Microelectronic engineering (01.04.2004)
Published in Microelectronic engineering (01.04.2004)
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Conference Proceeding
Journal Article
Titanium dioxide (TiO 2 )-based gate insulators
Campbell, S. A., Kim, H.-S., Gilmer, D. C., He, B., Ma, T., Gladfelter, W. L.
Published in IBM journal of research and development (01.05.1999)
Published in IBM journal of research and development (01.05.1999)
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Journal Article
Grafting of High-Density Poly(Ethylene Glycol) Monolayers on Si(111)
Zhu, X.-Y, Jun, Y, Staarup, D. R, Major, R. C, Danielson, S, Boiadjiev, V, Gladfelter, W. L, Bunker, B. C, Guo, A
Published in Langmuir (11.12.2001)
Published in Langmuir (11.12.2001)
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Journal Article
A Delivery System for Precursor Vapors Based on Sublimation in a Fluidized Bed
Vahlas, C., Caussat, B., Senocq, F., Gladfelter, W. L., Aloui, L., Moersch, T.
Published in Chemical vapor deposition (01.03.2007)
Published in Chemical vapor deposition (01.03.2007)
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Journal Article
Synthesis and Structures of Bis(2-dimethylaminoethyl)amine Adducts of Strontium Bis(2,2,6,6-tetramethylheptane-3,5-dionate) and Their Use in the CVD of Cubic Strontium-Doped Hafnium Dioxides
Luo, B., Yu, D., Kucera, B. E., Campbell, S. A., Gladfelter , W. L.
Published in Chemical vapor deposition (01.08.2007)
Published in Chemical vapor deposition (01.08.2007)
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Journal Article
High mobility HfO2 n- and p-channel transistors
CAMPBELL, S. A, MA, T. Z, SMITH, R, GLADFELTER, W. L, CHEN, F
Published in Microelectronic engineering (01.11.2001)
Published in Microelectronic engineering (01.11.2001)
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Conference Proceeding
Journal Article
Group IVB metal oxides high permittivity gate insulators deposited from anhydrous metal nitrates
Tiezhong Ma, Campbell, S.A., Smith, R., Hoilien, N., Boyong He, Gladfelter, W.L., Hobbs, C., Buchanan, D., Taylor, C., Gribelyuk, M., Tiner, M., Coppel, M., Jang Jung Lee
Published in IEEE transactions on electron devices (01.10.2001)
Published in IEEE transactions on electron devices (01.10.2001)
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Journal Article
Rapid olefin hydrogenation catalyzed by anion-promoted ruthenium clusters
Zuffa, Janet L, Blohm, Margaret L, Gladfelter, Wayne L
Published in Journal of the American Chemical Society (01.02.1986)
Published in Journal of the American Chemical Society (01.02.1986)
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Journal Article
Low temperature chemical vapor deposition of ZrO2 on Si(100) using anhydrous zirconium(V) nitrate
SMITH, Ryan C, HOILIEN, Noel, TAYLOR, Charles J, TIEZHONG MA, CAMPBELL, Stephen A, ROBERTS, Jeffrey T, COPEL, Matthew, BUCHANAN, D. A, GRIBELYUK, Michael, GLADFELTER, Wayne L
Published in Journal of the Electrochemical Society (01.09.2000)
Published in Journal of the Electrochemical Society (01.09.2000)
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