Application of Metastable Phase Diagrams to Silicate Thin Films for Alternative Gate Dielectrics
Stemmer, Susanne, Chen, Zhiqiang, Levi, Carlos G., Lysaght, Patrick S., Foran, Brendan, Gisby, John A., Taylor, Jeff R.
Published in Japanese Journal of Applied Physics (2003)
Published in Japanese Journal of Applied Physics (2003)
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Journal Article
Structure and stability of alternative gate dielectrics for Si CMOS
Stemmer, S., Yan Yang, Youli Li, Foran, B., Lysaght, P.S., Gisby, J.A., Taylor, J.R., Streiffer, S.K., Fuoss, P., Seifert, S., Wenjuan Zhu, Ma, T.P.
Published in International Semiconductor Device Research Symposium, 2003 (2003)
Published in International Semiconductor Device Research Symposium, 2003 (2003)
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Conference Proceeding