Soft x-ray lithography using radiation from laser-produced plasmas
Gohil, P, Kapoor, H, Ma, D, Pekerar, M C, McIlrath, T J, Ginter, M L
Published in Applied optics (2004) (01.07.1985)
Published in Applied optics (2004) (01.07.1985)
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Journal Article
Rare-earth plasma light source for VUV applications
O'Sullivan, G, Carroll, P K, McLlrath, T J, Ginter, M L
Published in Applied optics (2004) (01.09.1981)
Published in Applied optics (2004) (01.09.1981)
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Repetitively pulsed-plasma soft x-ray source
Nagel, D J, Brown, C M, Peckerar, M C, Ginter, M L, Robinson, J A, McIlrath, T J, Carroll, P K
Published in Applied optics (2004) (01.05.1984)
Published in Applied optics (2004) (01.05.1984)
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