CMOS-MEMS Lateral Electrothermal Actuators
Gilgunn, P.J., Jingwei Liu, Sarkar, N., Fedder, G.K.
Published in Journal of microelectromechanical systems (01.02.2008)
Published in Journal of microelectromechanical systems (01.02.2008)
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Journal Article
Aspect ratio dependent etch modulation for CMOS-MEMS applications
Gilgunn, P.J., Alfaro, J.F., Fedder, G.K.
Published in TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference (01.06.2009)
Published in TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference (01.06.2009)
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Conference Proceeding
A CMOS-MEMS rotary microactuator suitable for hard disk drive applications
Messner, W.C., Bain, J.A., Koenders, M., Groenesteijn, J., Marsman, G.H., Gilgunn, P.J., Fedder, G.K.
Published in TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference (01.06.2009)
Published in TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference (01.06.2009)
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Conference Proceeding