Gate isolation after cobalt suicide processing
Swartz, J. C., Gigante, J. R., Costello, J. A., Burnell, D. M., Ghoshtagore, R. N.
Published in Journal of electronic materials (01.02.1990)
Published in Journal of electronic materials (01.02.1990)
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Published in Revista mexicana de astronomía y astrofísica (2005)
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Published in Revista mexicana de astronomía y astrofísica (2005)
Journal Article
Gate isolation after cobalt silicide processing
SWARTZ, J. C, GIGANTE, J. R, COSTELLO, J. A, BURNELL, D. M, GHOSHTAGORE, R. N
Published in Journal of electronic materials (01.02.1990)
Published in Journal of electronic materials (01.02.1990)
Get full text
Journal Article